H01J 2237/024
Moving components not otherwise provided for
H01J2237/024 (Moving components not otherwise provided for) appears on 220 US grants and 255 published applications in this corpus.
Search patents in H01J- Granted patents
- 220
- Published applications
- 255
- Assignees
- 106
- Inventors
- 631
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 1 |
| 2002 | 1 | 0 |
| 2003 | 1 | 3 |
| 2004 | 0 | 2 |
| 2005 | 3 | 4 |
| 2006 | 1 | 4 |
| 2007 | 3 | 2 |
| 2008 | 2 | 8 |
| 2009 | 4 | 12 |
| 2010 | 7 | 9 |
| 2011 | 5 | 8 |
| 2012 | 9 | 16 |
| 2013 | 11 | 11 |
| 2014 | 11 | 5 |
| 2015 | 6 | 16 |
| 2016 | 11 | 7 |
| 2017 | 11 | 13 |
| 2018 | 18 | 17 |
| 2019 | 17 | 14 |
| 2020 | 15 | 20 |
| 2021 | 18 | 11 |
| 2022 | 8 | 10 |
| 2023 | 10 | 25 |
| 2024 | 8 | 16 |
| 2025 | 14 | 11 |
| 2026 | 14 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Chamber impedance management in a processing chamber22 Sep 2026US 12,744,185 B2APPLIED Materials.Inc.
- High precision edge ring centering for substrate processing systems22 Sep 2026US 12,744,191 B2Lam Research Corporation
- Electron-optical assembly comprising electromagnetic shielding8 Sep 2026US 12,731,754 B2ASML Netherlands B. V.
- Substrate processing apparatus11 Aug 2026US 12,706,283 B2Semes Co., Ltd.
- Ion milling apparatus16 Jun 2026US 12,658,399 B2Hitachi High-Tech Corporation
- Plasma processing apparatus and shower head27 Aug 2026US 2026/0253843 A1Tokyo Electron Limited
- Substrate processing apparatus and a method of processing a substrate using the same23 Jul 2026US 2026/0213135 A1Samsung Electronics Co., Ltd.
- Semiconductor manufacturing apparatus including reflector2 Jul 2026US 2026/0188604 A1Samsung Electronics Co., Ltd.
- Ion implanter28 May 2026US 2026/0148925 A1Advanced Ion Beam Technology, Inc.
- Mobile radiation detector system for ion implanters28 May 2026US 2026/0148928 A1Axcelis Technologies, Inc.
Most cited
By later US patents
- Particle-optical projection system1,466US 7,388,217 B2IMS Nanofabrication GmbH · 2008
- Low-energy scanning transmission electron microscope58US 4,618,767 AInternational Business Machines Corporation · 1986
- Charged particle beam apparatus55US 7,582,885 B2Hitachi High-Technologies Corporation · 2009
- Beam tuning with automatic magnet pole rotation for ion implanters43US 7,476,855 B2Axcelis Technologies, Inc. · 2009
- Apparatus of plural charged-particle beams33US 10,879,031 B2ASML Netherlands B. V. · 2020