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US 12,706,283 B2Granted
Substrate processing apparatus
AssigneeSemes Co., Ltd.
InventorsYoung Hwan Yang, Soo Ryun Ro, Jeong Seok Kang
Life of this patent
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Abstract
Proposed is a substrate processing apparatus capable of replacing consumables and, more particularly, to a technique for supporting replacement of consumables such as a shower head and a focus ring while maintaining a chamber processing environment of the substrate processing apparatus.
Claims12
A substrate processing apparatus, the apparatus comprising:
- a process chamber provided with a processing space for performing a substrate processing process;
- a lifting member disposed in the process chamber and supporting a part that constitutes the substrate processing apparatus,
- wherein the part is located in the processing space and the lifting member is configured to lift or lower the part, and
- wherein the part comprises a shower head disposed in an upper part of the processing space;
- a door means provided at a wall surface of the process chamber to selectively provide a passage between the processing space and an exterior to the process chamber according to opening of the door means;
- a transport means configured to remove the part from the processing space through the passage of the door means;
- a detachment means configured to disassemble the shower head from the process chamber,
- wherein the shower head includes a fixed plate and a replacement plate, the fixed plate and the replacement plate stacked on each other,
- wherein the detachment means is configured to disassemble the replacement plate from the fixed plate,
- wherein the fixed plate includes a plurality of first fastening parts,
- wherein the replacement plate includes a plurality of second fastening parts that communicate with the plurality of first fastening parts, respectively, and
- wherein the detachment means includes:
- a plurality of fastening members that are inserted into the plurality of first fastening parts, respectively, and that are selectively inserted into the plurality of second fastening parts, respectively, for the disassembly of the replacement plate;
- a fastening actuator configured to rotate the plurality of the fastening members;
- a torque sensor configured to measure a coupling strength of the plurality of fastening members to the shower head;
- and
- a detachment means controller configured to control the fastening actuator based on the coupling strength.
14 more elements
A substrate processing apparatus, the apparatus comprising:
- a process chamber provided with a processing space for performing a substrate processing process;
- a lifting member disposed in the process chamber and configured to lift or lower a part that is located in the processing space and constitutes the substrate processing apparatus, and
- wherein the part comprises a shower head disposed in an upper part of the processing space;
- a door means provided at a wall surface of the process chamber to selectively provide a passage between the processing space and an exterior to the process chamber according to opening of the door means;
- a transport means configured to remove the part from the processing space through the passage of the door means,
- wherein the shower head includes a fixed plate and a replacement plate, the fixed plate and the replacement plate stacked on each other, and
- wherein one of the fixed plate and the replacement plate is provided with a fastening protrusion, and a remaining one is provided with a fastening groove;
- and
- a detachment means is configured to rotate the replacement plate to fasten and separate the fastening protrusion into and from the fastening groove so as to mount and dismount the replacement plate to and from the fixed plate,
- wherein the lifting member contacts the replacement plate during a time when the replacement plate is dismounted from the fixed plate.
7 more elements
Dependencies are inferred from the claim text.