G03F 7/70408
Interferometric lithography
Official title: {Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect}
G03F7/70408 (Interferometric lithography) appears on 248 US grants and 249 published applications in this corpus.
Search patents in G03F- Granted patents
- 248
- Published applications
- 249
- Assignees
- 166
- Inventors
- 571
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 5 | 0 |
| 1999 | 4 | 0 |
| 2000 | 7 | 0 |
| 2001 | 11 | 4 |
| 2002 | 4 | 6 |
| 2003 | 15 | 6 |
| 2004 | 5 | 4 |
| 2005 | 3 | 12 |
| 2006 | 5 | 17 |
| 2007 | 4 | 12 |
| 2008 | 4 | 11 |
| 2009 | 5 | 15 |
| 2010 | 16 | 11 |
| 2011 | 4 | 7 |
| 2012 | 8 | 7 |
| 2013 | 11 | 16 |
| 2014 | 10 | 9 |
| 2015 | 15 | 12 |
| 2016 | 12 | 14 |
| 2017 | 6 | 9 |
| 2018 | 12 | 5 |
| 2019 | 4 | 7 |
| 2020 | 5 | 8 |
| 2021 | 7 | 13 |
| 2022 | 8 | 10 |
| 2023 | 13 | 11 |
| 2024 | 8 | 9 |
| 2025 | 10 | 9 |
| 2026 | 8 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Alignment method based on holographic lithography, system and device22 Sep 2026US 12,743,036 B2Hyper-Optics (Beijing) Technologies Ltd.
- Method to determine an absolute position of a movable object, interferometer system, projection system and lithograpic apparatus8 Sep 2026US 12,729,948 B2ASML Netherlands B. V.
- Systems and methods for combinatorial arrays using dynamic interference lithography4 Aug 2026US 12,699,325 B2Rutgers, The State University of New Jersey
- Apparatus and method for laser interference structuring of substrates with periodic dot structures for anti-reflection properties7 Jul 2026US 12,675,050 B2Fusion Bionic GmbH
- Laser processing device having an optical arrangement which comprises a beam splitter9 Jun 2026US 12,649,200 B24Jetmicrotechgmbh
- Method and apparatus for fabrication of large area 3d photonic crystals with embedded waveguides8 Oct 2026US 2026/0310072 A1UNM Rainforest Innovations
- Systems and methods for combinatorial arrays using dynamic interference lithography8 Oct 2026US 2026/0310091 A1Rutgers, The State University of New Jersey
- Laser processing device having an optical arrangement which comprises a beam splitter24 Sep 2026US 2026/0284784 A14Jet Microtech GmbH
- Method and system for generation of lithography patterns27 Aug 2026US 2026/0251966 A1Vestlandets Innovasjonsselskap AS
- Substrate with anti-fogging properties1 Jan 2026US 2026/0001809 A1Fusion Bionic GmbH
Most cited
By later US patents
- Methods and devices for fabricating three-dimensional nanoscale structures336US 7,704,684 B2The Board of Trustees of the University of Illinois · 2010
- Method and apparatus for extending spatial frequencies in photolithography images288US 6,042,998 AUniversity of New Mexico · 2000
- Method for fine-line interferometric lithography112US 5,415,835 AUniversity of New Mexico · 1995
- Method for manufacture of quantum sized periodic structures in Si materials110US 5,705,321 AUniversity of New Mexico · 1998
- Lithography system and method of manufacturing devices using the lithography system90US 6,304,318 B1Canon Kabushiki Kaisha · 2001