G03F 7/2049
Using a cantilever
Official title: {using a cantilever}
G03F7/2049 (Using a cantilever) appears on 56 US grants and 42 published applications in this corpus.
Search patents in G03F- Granted patents
- 56
- Published applications
- 42
- Assignees
- 36
- Inventors
- 164
- Latest grant
- 3 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 1 |
| 2002 | 3 | 2 |
| 2003 | 1 | 2 |
| 2004 | 2 | 2 |
| 2005 | 2 | 5 |
| 2006 | 2 | 3 |
| 2007 | 3 | 7 |
| 2008 | 3 | 4 |
| 2009 | 8 | 0 |
| 2010 | 1 | 2 |
| 2011 | 2 | 2 |
| 2012 | 0 | 0 |
| 2013 | 3 | 0 |
| 2014 | 0 | 2 |
| 2015 | 1 | 4 |
| 2016 | 1 | 0 |
| 2017 | 4 | 1 |
| 2018 | 2 | 3 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 2 |
| 2025 | 0 | 0 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for producing a nano-structured element made of hexagonal boron nitride and device comprising such an element3 Mar 2026US 12,566,372 B2ETH Zurich
- Microfabricated optical probe25 Dec 2018US 10,161,961 B2The United States of America as represented by the Secretary of Commerce
- Scanning probe microscope13 Nov 2018US 10,126,325 B2Shimadzu Corporation
- Heat actuated and projected lithography systems and methods19 Sep 2017US 9,766,551 B2Northwestern University
- Multiple probe detection and actuation22 Aug 2017US 9,739,798 B2Infinitesima Limited
- Method for producing a nano-structured element made of hexagonal boron nitride and device comprising such an element1 Aug 2024US 2024/0255844 A1ETH Zurich
- Apparatus for analysing and/or processing a sample with a particle beam and method27 Jun 2024US 2024/0210335 A1
- Microfabricated optical probe26 Jul 2018US 2018/0210009 A1The United States of America as represented by the Secretary of Commerce
- Scanning probe microscope21 Jun 2018US 2018/0172726 A1Shimadzu Corporation
- Heat actuated and projected lithography systems and methods1 Mar 2018US 2018/0059550 A1Northwestern University
Most cited
By later US patents
- Method of performing lithography using cantilever array111US 5,666,190 AThe Board of Trustees of the Leland Stanford Jr. University · 1997
- Atomic force microscope for high speed imaging including integral actuator and sensor99US 5,883,705 AThe Board of Trustees of the Leland Stanford Jr. University · 1999
- Vibrating probe for a scanning probe microscope91US 6,075,585 AThe Board of Trustees of the Leland Stanford Jr. University · 2000
- Object inspection and/or modification system and method89US 6,337,479 B12002
- Method and apparatus for writing or etching narrow linewidth patterns on insulating materials87US 5,047,649 AInternational Business Machines Corporation · 1991