Microfabricated optical probe
AssigneeThe United States of America as represented by the Secretary of Commerce
InventorsVladimir A. Aksyuk, Kartik Srinivasan, Thomas Michels
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Abstract
A microfabricated optical probe includes: a cantilever; an optical waveguide disposed at a periphery of the cantilever and including an optical loop, the optical loop being disposed coplanar with the cantilever; a mechanical support interposed between and interconnecting the cantilever and the optical waveguide with the mechanical support such that the cantilever and optical waveguide move together; and a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude, wherein the cantilever and the optical waveguide flex independently of the substrate.
Claims12
A microfabricated optical probe comprising:
- a cantilever;
- an optical waveguide disposed at a periphery of the cantilever and comprising an optical loop, the optical loop being disposed proximal to the cantilever free end;
- and
- a substrate on which the cantilever is disposed and from which the cantilever and the optical loop protrude,
- wherein the waveguide is mechanically connected to the cantilever such that the cantilever and waveguide move together
- wherein the cantilever and the optical waveguide flex independently of the substrate.
Dependencies are inferred from the claim text.