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G03B 27/60

Using a vacuum or fluid pressure

Official title: using a vacuum or fluid pressure

G03B27/60 (Using a vacuum or fluid pressure) appears on 62 US grants and 11 published applications in this corpus.

Search patents in G03B

Granted patents: 62
Published applications: 11
Assignees: 36
Inventors: 100
Latest grant: 11 Oct 2022

Filings by year

G03B 27/60: granted patents and published applications per publication year
Year	Granted patents	Published applications
1976	3	0
1977	0	0
1978	1	0
1979	1	0
1980	2	0
1981	3	0
1982	1	0
1983	1	0
1984	3	0
1985	2	0
1986	3	0
1987	7	0
1988	6	0
1989	3	0
1990	1	0
1991	1	0
1992	2	0
1993	1	0
1994	2	0
1995	4	0
1996	0	0
1997	0	0
1998	3	0
1999	1	0
2000	3	0
2001	1	0
2002	0	3
2003	2	2
2004	0	0
2005	1	1
2006	1	0
2007	0	0
2008	0	0
2009	0	0
2010	0	0
2011	0	2
2012	0	0
2013	1	2
2014	0	0
2015	1	0
2016	0	0
2017	0	0
2018	0	0
2019	0	0
2020	0	0
2021	0	1
2022	1	0

By publication year. Applications have been published since 2001.

Recent patents

Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article11 Oct 2022US 11,466,787 B2Canon Kabushiki Kaisha
Substrate holding device, lithography apparatus using same, and device manufacturing method24 Nov 2015US 9,195,129 B2Canon Kabushiki Kaisha
Substrate holding device, lithography apparatus using same, and device manufacturing method25 Jun 2013US 8,472,007 B2Canon Kabushiki Kaisha
Photosensitive tabular member suction mechanism and image recording device28 Feb 2006US 7,006,201 B2Fuji Photo Film Co., Ltd.
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same8 Mar 2005US 6,864,962 B2Canon Kabushiki Kaisha

Most cited

By later US patents