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US 2021/0190219 A1Published application
Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorYusuke Shiomura
Life of this patent
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Abstract
The present invention provides a switching valve comprising: a housing including a first port, a second port, and a third port; a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port; and a pressing member configured to press the valve element toward a side of the first port.
Claims10
A switching valve comprising:
- a housing including a first port, a second port, and a third port;
- a valve element configured to be movable in the housing so as to selectively allow one of the first port and the second port to communicate with the third port in accordance with a pressure difference between the first port and the second port;
- and
- a pressing member configured to press the valve element toward a side of the first port.
1 more element
Dependencies are inferred from the claim text.