Back to results
US 8,472,007 B2Granted
Substrate holding device, lithography apparatus using same, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMasatoshi Endo
Life of this patent
Estimating the term…
Abstract
The substrate holding device of the present invention includes a holding unit that adsorbs and holds the substrate, a measuring section that measures a physical quantity relating to a adsorption force of the holding unit with the substrate mounted on the holding unit; and a control section that carries out a first determination based on a first condition and a measurement result obtained by the measuring section and a second determination based on a second condition that is different from the first condition and a measurement result obtained by the measuring section to select one of at least three preset operations based on the result of first and second determinations to thereby execute processing depending on the selected operation.
Claims22
A substrate holding device for holding a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a measuring section that measures a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not the measured physical quantity exceeds a first threshold value and a second determination that determines whether or not the measured physical quantity exceeds a second threshold value different from the first threshold value to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to execute processing depending on the specified cause of the adsorption anomaly.
1 more element
A substrate holding device for holding a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a plurality of measuring sections that measure a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not all physical quantities measured by the plurality of measuring sections exceeds a predetermined value and a second determination that determines whether or not a distribution of the physical quantities measured by the plurality of measuring sections exceeds a predetermined range to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to execute processing depending on the specified cause of the adsorption anomaly.
1 more element
A substrate holding device for holding a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a measuring section that measure a physical quantity relating to an adsorption force of the holding unit in response to elapsed time with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not the time required for the physical quantity measured by the measuring section to reach a threshold value exceeds a first time and a second determination that determines whether or not the time required for the physical quantity measured by the measuring section to reach a threshold value exceeds a second time different from the first time to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to execute processing depending on the specified cause of the adsorption anomaly.
1 more element
A lithography apparatus for transferring a pattern onto a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a stage device or a transport hand for moving the holding unit;
- a measuring section that measures a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not the measured physical quantity exceeds a first threshold value and a second determination that determines whether or not the measured physical quantity exceeds a second threshold value different from the first threshold value to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to control the stage device or the transport hand depending on the specified cause of the adsorption anomaly.
2 more elements
A device manufacturing method comprising the steps of:
- transferring a pattern onto a substrate by the utilization of a lithography apparatus;
- and
- developing the transferred substrate,
- wherein the lithography apparatus comprises:
- a holding unit that adsorbs and holds the substrate;
- a stage device or a transport hand for moving the holding unit;
- a measuring section that measures a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not the measured physical quantity exceeds a first threshold value and a second determination that determines whether or not the measured physical quantity exceeds a second threshold value different from the first threshold value to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to control the stage device or the transport hand depending on the specified cause of the adsorption anomaly.
6 more elements
A lithography apparatus for transferring a pattern onto a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a stage device or a transport hand for moving the holding unit;
- a plurality of measuring sections that measure a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that carries out a first determination that determines whether or not all physical quantity measured by the plurality of measuring sections exceeds predetermined value and a second determination that determines whether or not the physical quantity measured by the plurality of measuring sections exceeds a predetermined range to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to control the stage device or the transport hand depending on the specified cause of the adsorption anomaly.
2 more elements
A lithography apparatus for transferring a pattern onto a substrate, comprising:
- a holding unit that adsorbs and holds the substrate;
- a stage device or a transport hand for moving the holding unit;
- a measuring section that measures a physical quantity relating to an adsorption force of the holding unit with the substrate mounted on the holding unit;
- and
- a control section that carries out a first determination that determines whether or not the time required for the physical quantity measured by the measuring section to reach a threshold value exceeds a first time and a second determination that determines whether or not the time required for the physical quantity measured by the measuring section to reach a threshold value exceeds a second time different from the first time to determine the presence or absence of an adsorption anomaly of the substrate and to specify a cause of the adsorption anomaly based on the result of first and second determinations, if the control section determines that the adsorption anomaly is present, so as to control the stage device or the transport hand depending on the specified cause of the adsorption anomaly.
2 more elements
A stage device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a pressure sensor that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not the measured pressure exceeds a first threshold value and a second determination that determines whether or not the measured pressure exceeds a second threshold value different from the first threshold value to move the substrate by a predetermined speed or acceleration if the measured pressure is lower than the first threshold value, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the measured pressure is higher than the first threshold value and lower than the second threshold value.
A substrate transport device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a pressure sensor that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not the measured pressure exceeds a first threshold value and a second determination that determines whether or not the measured pressure exceeds a second threshold value different from the first threshold value to move the substrate by a predetermined speed or acceleration if the measured pressure is lower than the first threshold value, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the measured pressure is higher than the first threshold value and lower than the second threshold value.
A stage device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a plurality of pressure sensors that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not all pressures measured by the plurality of pressure sensor exceed predetermined value and a second determination that determines whether or not a distribution of the pressures measured by the plurality of pressure sensors exceeds a predetermined range to move the substrate by a predetermined speed or acceleration if all the pressure measured by the plurality of pressure sensor are lower than the predetermined value, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the pressure measured by at least one of the plurality of pressure sensor is higher than the predetermined value and the distribution of the pressures exceeds the predetermined range.
A substrate transport device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a plurality of pressure sensors that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not all pressures measured by the plurality of pressure sensor exceed a predetermined value and a second determination that determines whether or not a distribution of the pressures measured by the plurality of pressure sensors exceeds a predetermined range to move the substrate by a predetermined speed or acceleration if all the pressures measured by the plurality of pressure sensors are lower than the predetermined value, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the pressure measured by at least one of the plurality of pressure sensor is higher than the predetermined value and the distribution of the pressure exceeds the predetermined range.
A stage device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a pressure sensor that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not the time required for the pressure measured by the pressure sensor to reach a threshold value exceeds a first time and a second determination that determines whether or not the time required for the pressure measured by the pressure sensor to reach a threshold value exceeds a second time different from the first time to move the substrate by a predetermined speed or acceleration if the time required to reach the pressure measured by the pressure sensor is shorter than the first time, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the time required to reach the pressure measured by the pressure sensor is longer than the first time and shorter than the second time.
A substrate transport device holding a substrate to move, comprising:
- a holding unit that adsorbs and holds the substrate by reducing the pressure in a space formed between the substrate;
- a pressure sensor that measures the pressure in the space or a space that communicates with the space with the substrate mounted on the holding unit;
- a control section that carries out a first determination that determines whether or not the time required for the pressure measured by the pressure sensor to reach a threshold value exceeds a first time and a second determination that determines whether or not the time required for the pressure measured by the pressure sensor to reach a threshold value exceeds a second time different from the first time to move the substrate by a predetermined speed or acceleration if the time required to reach the pressure measured by the pressure sensor is shorter than the first time, and to move the substrate by a speed or acceleration that is lower than the predetermined speed or acceleration if the time required to reach the pressure measured by the pressure sensor is longer than the first time and shorter than the second time.
Dependencies are inferred from the claim text.