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US 6,864,962 B2Granted
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same
AssigneeCanon Kabushiki Kaisha
InventorMasahiro Morisada
Life of this patent
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Abstract
An anti-vibration apparatus includes a table, a pneumatic spring for applying a force to the table, an electromagnetic actuator for applying a force to the table, and a first generator which generates a driving signal for the electromagnetic actuator based on at least one of a target position and a target speed with respect to a movable object on the table.
Claims10
An anti-vibration apparatus comprising:
- a table;
- a pneumatic spring for applying a force to said table;
- an electromagnetic actuator for applying a force to said table;
- and
- a first generator which generates a driving signal for said electromagnetic actuator based on at least one of a target position and a target speed of a movable object which is supported by said table and movable relative to said table.
2 more elements
Dependencies are inferred from the claim text.