G01N 27/128
Microapparatus
Official title: {Microapparatus}
G01N27/128 (Microapparatus) appears on 298 US grants and 420 published applications in this corpus.
Search patents in G01N- Granted patents
- 298
- Published applications
- 420
- Assignees
- 205
- Inventors
- 916
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 2 |
| 2003 | 2 | 4 |
| 2004 | 2 | 7 |
| 2005 | 1 | 10 |
| 2006 | 3 | 4 |
| 2007 | 6 | 3 |
| 2008 | 4 | 3 |
| 2009 | 6 | 13 |
| 2010 | 0 | 7 |
| 2011 | 7 | 6 |
| 2012 | 7 | 8 |
| 2013 | 7 | 14 |
| 2014 | 11 | 20 |
| 2015 | 9 | 15 |
| 2016 | 12 | 17 |
| 2017 | 16 | 33 |
| 2018 | 11 | 38 |
| 2019 | 31 | 41 |
| 2020 | 32 | 48 |
| 2021 | 23 | 31 |
| 2022 | 30 | 23 |
| 2023 | 24 | 29 |
| 2024 | 23 | 16 |
| 2025 | 17 | 18 |
| 2026 | 7 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Sensor for detecting gas and gas flow and method for manufacturing sensor element of sensor15 Sep 2026US 12,736,493 B2Hongik University Industry-Academia Cooperation Foundation
- Chemiresistive substrate for a hydrogen gas sensor26 May 2026US 12,638,409 B2Royal Melbourne Institute of Technology
- Method for manufacturing a sensor device28 Apr 2026US 12,613,471 B2TDK Corporation
- Biomarker detection using layered receptor and electrode configuration14 Apr 2026US 12,601,736 B2MindMend Biotech LLC
- MEMS gas sensor and manufacturing method thereof24 Feb 2026US 12,560,567 B2Electronics and Telecommunications Research Institute
- Method for manufacturing sensor and sensor27 Aug 2026US 2026/0251603 A1Kabushiki Kaisha Toshiba
- MEMS-Type Semiconductor Gas Sensor20 Aug 2026US 2026/0243721 A1New Cosmos Electric Co., Ltd.
- Systems, apparatuses, and methods for gas sensing18 Jun 2026US 2026/0168950 A1Honeywell International Inc.
- Biological Information Sensing Device4 Jun 2026US 2026/0153468 A1Metal Industries Research & Development Centre
- Gas sensor and method of manufacturing the same5 Mar 2026US 2026/0063582 A1Electronics and Telecommunications Research Institute
Most cited
By later US patents
- Apparatus and process for sensing fluoro species in semiconductor processing systems484US 7,080,545 B2Advanced Technology Materials, Inc. · 2006
- Apparatus and process for sensing fluoro species in semiconductor processing systems478US 7,296,460 B2Advanced Technology Materials, Inc. · 2007
- Apparatus and process for sensing fluoro species in semiconductor processing systems476US 7,475,588 B2Advanced Technology Materials, Inc. · 2009
- Electronic techniques for analyte detection312US 6,627,154 B1Cyrano Sciences, Inc. · 2003
- Sensor mounted in flip-chip technology on a substrate274US 8,791,532 B2Sensirion AG · 2014