Systems, apparatuses, and methods for gas sensing
AssigneeHoneywell International Inc.
InventorsPrince Ashwin Kumar Anburaj Jayakumar, Pavan Ramachandravitthal Kashyap, Scott E. Beck, Miao Xu
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Abstract
Systems, apparatuses, and methods for gas sensing are provided. A gas sensor may be a 3D MEMS gas sensor and include a plurality of electrodes and a plurality of polymer coatings. Each of the plurality of polymer coatings is deposited on top of one of one of the plurality of electrodes, and each of the plurality of polymer coatings has a different coating depth. The polymer coatings may change impedance in various concentrations of a target gas. The gas sensor may transmit a signal through the one or more polymer coatings and generate an output signal based on a concentration of the target gas.
Claims20
A 3D MEMS gas sensor comprising:
- a plurality of electrodes;
- and,
- a plurality of polymer coatings, wherein each of the plurality of polymer coatings is deposited on top of one of one of the plurality of electrodes, and wherein each of the plurality of polymer coatings has a different coating depth.
A method of gas sensing comprising:
- providing a 3D MEMS gas sensor comprising:
- a plurality of electrodes;
- and,
- a plurality of polymer coatings, wherein each of the plurality of polymer coatings is deposited on top of one of one of the plurality of electrodes, and wherein each of the plurality of polymer coatings has a different coating depth;
- exposing the 3D MEMS gas sensor to a first gas;
- and, generating an output signal when a concentration of the first gas is above a first threshold.
Dependencies are inferred from the claim text.