MEMS-Type Semiconductor Gas Sensor

A MEMS-type semiconductor gas sensor comprising:

• a MEMS-type semiconductor gas detection element configured to detect a target gas contained in a gas to be measured;
• a housing that houses the MEMS-type semiconductor gas detection element and has an opening through which the gas to be measured can flow;
• and
• a filter member disposed between the opening and the MEMS-type semiconductor gas detection element inside the housing,
• wherein the filter member comprises a first filter member configured to remove siloxanes and a second filter member configured to remove sulfur-based gases,
• wherein the first filter member has a greater removal capability for siloxanes than the second filter member,
• wherein the second filter member has a greater removal capability for sulfur-based gases than the first filter member,
• wherein the filter member does not include a precious metal, and
• wherein the second filter member includes zinc aluminosilicate or allophane.