G01N 2021/8867
Using sequentially two or more inspection runs
Official title: {using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing}
G01N2021/8867 (Using sequentially two or more inspection runs) appears on 187 US grants and 195 published applications in this corpus.
Search patents in G01N- Granted patents
- 187
- Published applications
- 195
- Assignees
- 147
- Inventors
- 523
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 1 | 0 |
| 1993 | 6 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 2 |
| 2002 | 0 | 4 |
| 2003 | 1 | 2 |
| 2004 | 1 | 4 |
| 2005 | 4 | 4 |
| 2006 | 6 | 4 |
| 2007 | 2 | 3 |
| 2008 | 4 | 5 |
| 2009 | 4 | 8 |
| 2010 | 7 | 6 |
| 2011 | 6 | 3 |
| 2012 | 4 | 7 |
| 2013 | 4 | 7 |
| 2014 | 4 | 5 |
| 2015 | 4 | 3 |
| 2016 | 6 | 5 |
| 2017 | 5 | 11 |
| 2018 | 8 | 14 |
| 2019 | 10 | 13 |
| 2020 | 19 | 13 |
| 2021 | 11 | 14 |
| 2022 | 9 | 13 |
| 2023 | 11 | 8 |
| 2024 | 12 | 13 |
| 2025 | 10 | 14 |
| 2026 | 7 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Lock-in averaging for semiconductor diagnostics6 Oct 2026US 12,754,145 B2Imec Vzw
- Vision inspection systems and methods using light sources of different wavelengths7 Apr 2026US 12,596,080 B2GM Global Technology Operations LLC
- High clarity gemstone facet and internal imaging analysis31 Mar 2026US 12,590,902 B2Gemological Institute of America, Inc. (GIA)
- Multichannel LED light to enable photometric stereo for 3D reconstruction17 Mar 2026US 12,578,286 B2UnitX, Inc.
- Measurement deviation analysis for a semiconductor specimen10 Mar 2026US 12,571,739 B2Applied Materials Israel Ltd.
- Defect detection method, defect detection device, and defect detection program23 Jul 2026US 2026/0210873 A1FUJIFILM Corporation
- Ultra-high sensitivity hybrid inspection with full wafer coverage capability with step and settle stage25 Jun 2026US 2026/0177502 A1KLA Corporation
- Inspection system and inspection module11 Jun 2026US 2026/0160702 A1Wnc Corporation
- Variably switched uniform and striped lighting panel30 Apr 2026US 2026/0117948 A1Fyusion, Inc.
- Specialized lighting configuration for projection of striped lighting30 Apr 2026US 2026/0118279 A1Fyusion, Inc.
Most cited
By later US patents
- Two-phase optical inspection method and apparatus for defect detection177US 5,699,447 AOrbot Instruments Ltd. · 1997
- Electronic control of an automatic wafer inspection system169US 4,644,172 AKLA Instruments Corporation · 1987
- Method and apparatus for inspection of specular, three-dimensional features125US 5,058,178 AAT&T Bell Laboratories · 1991
- Inspection system and method for bond detection and validation of surface mount devices108US 5,963,662 AGeorgia Tech Research Corporation · 1999
- Particle detection method including comparison between sequential scans100US 4,766,324 ATencor Instruments · 1988