US 4,766,324 AGranted

Particle detection method including comparison between sequential scans

AssigneeTencor Instruments

InventorsSoheil Saadat, Jiri Pecen, Armand P. Neukermans, George J. Kren

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Abstract

A particle detection method for matching particles detected in two scans of a surface taken at different times in which particles having a light scattering intensity above a collection threshold are first detected and the measured position and scattering intensity therefor stored in a computer memory. Corresponding first and second measured positions from the respective first and second scans are determined by forming a triangle from selected first detected particles and finding those second detected particles which form a variant triangle with matching perimeter and area. From these matching first and second particles a transformation is found for mapping first measured positions to corresponding second positions and vice versa. Areas around corresponding positions of particles having a scattering intensity above a display threshold are examined for matching particles. If not found, the area is reexamined at a reduced threshold. Matching particles are considered to be the same, while unmatched particles are considered to be either added or removed. The method provides an accurate count of particles for process contamination analysis.

Claims19

Dependent claims

A method of matching particles detected on a surface at consecutive times comprising,

detecting first particles on a surface at a first time, each first particle being characterized by a first measured position and by a first light scattering intensity reaching a photodetector that is above a predetermined collection threshold intensity,
storing said position and light scattering intensity information for each first particle in a computer memory,
detecting second particles on said surface at a second time, at least some of said second particles being the same as at least some of said first particles, each second particle being characterized by a second measured position and by a second light scattering intensity reaching a photodetector that is above said predetermined collection threshold intensity,
storing said position and light scattering intensity information for each second particle in a computer memory,
selecting from computer memory three or more first particles with light scattering intensities that are substantially above said threshold intensity, said selected first particles defining a first polygon characterized by a perimeter and an area,
selecting from computer memory candidate second particles for each of said selected first particles, each candidate second particle having a light scattering intensity within a predetermined range of intensities around the light scattering intensity of said selected first particle for which said second particle is a candidate,
forming variants of said first polygon with said candidate second particles, said variants characterized by a perimeter and area, candidate second particles forming the variant determined to have the perimeter and area closest to those of said first polygon to within a specified percentage being identified as the same as the corresponding selected first particles that form said first polygon, and
calculating from the first and second measured positions of said identified same particles the translation and rotation transformations which map one of said first and second measured positions into the other of said first and second measured positions.

5 more elements

A method of matching particles detected on a surface at consecutive times comprising,

(a) detecting first particles on a surface at a first time, each first particle being characterized by a first measured position and by a first light scattering intensity reaching a photodetector that is above a collection threshold intensity,
(b) storing said position and light scattering intensity information for each first particle in computer memory,
(c) detecting second particles on a surface at a second time, each second particle being characterized by a second measured position and by a second light scattering intensity reaching a photodetector that is above said collection threshold intensity,
(d) storing said position and light scattering intensity information for each second particle in computer memory,
(e) identifying corresponding first and second measured positions,
(f) examining corresponding first and second areas around the measured position and the identified corresponding position of each first and second particle having a light scattering intensity above a predetermined display threshold intensity, said display threshold intensity being higher than said collection threshold intensity, a single particle within each of the corresponding first and second areas, both having light scattering intensities above said display threshold intensity, being identified as the same particle, and
(g) whenever a particle having a light scattering intensity above said display threshold intensity is found within only one of said corresponding first and second areas, reexamining the other of said corresponding areas for a detected particle having a light scattering intensity that is reduced from said display threshold intensity by a predetermined amount, (i) a particle detected within said one area with a light scattering intensity above said display threshold and a particle detected within said corresponding other area with an intensity above said reduced threshold being identified as the same particle, (ii) a first particle detected within said first area with a light scattering intensity above said display threshold and no particle detected within said corresponding second area with an intensity above said reduced threshold being considered removed, and (iii) a second particle detected within said second area with a light scattering intensity above said display threshold and no particle detected within said corresponding first area with an intensity above said reduced threshold being considered added.

4 more elements

A method comprising,

(a) detecting with a measuring instrument at least one first event in a first set of measurements, each first event characterized by an event location and by a parameter measured by said instrument that is above a collection threshold,
(b) detecting with said instrument at least one second event in a second set of measurements, each second event characterized by an event location and by a parameter measured by said instrument that is above said collection threshold,
(c) for each event in one set of measurements with a measured parameter that is above a display threshold, examining an event location in the other set of measurements that corresponds to the event location of said event, an event detected at the corresponding event location in the other set of measurements with a measured parameter that is above said display threshold being determined to match the event in the one set of measurements, and
(d) whenever an event with a measured parameter that is above said display threshold is absent from said corresponding event location, reexamining said corresponding event location for events with a measured parameter above a reduced threshold, said reduced threshold being below said display threshold by a predetermined amount, an event detected at said corresponding event location in the other set of measurements with a measured parameter above said reduced threshold being determined to match the event in the one set of measurements, and
(e) whenever an event with a measured parameter that is above said reduced threshold is absent from said corresponding event location, a first event being determined to be old, and a second event being determined to be new.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 07/083,695Filed 7 Aug 1987
Granted: 23 Aug 1988
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

G01N 21/94
Investigating the presence of flaws or contamination: investigating contamination, e.g. dust
G01N 15/1468
Optical investigation techniques, e.g. flow cytometry: with spatial resolution of the texture or inner structure of the particle
G01N 2021/8867
Grading and classifying of flaws: using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
G01N 2201/1087
Miscellaneous: focussed scan beam, e.g. laser