G01N 2021/213
Spectrometric ellipsometry
Official title: {Spectrometric ellipsometry}
G01N2021/213 (Spectrometric ellipsometry) appears on 331 US grants and 308 published applications in this corpus.
Search patents in G01N- Granted patents
- 331
- Published applications
- 308
- Assignees
- 128
- Inventors
- 620
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 0 |
| 2002 | 2 | 7 |
| 2003 | 3 | 4 |
| 2004 | 8 | 17 |
| 2005 | 5 | 15 |
| 2006 | 19 | 11 |
| 2007 | 32 | 10 |
| 2008 | 24 | 13 |
| 2009 | 17 | 13 |
| 2010 | 16 | 10 |
| 2011 | 13 | 7 |
| 2012 | 7 | 4 |
| 2013 | 11 | 10 |
| 2014 | 6 | 12 |
| 2015 | 7 | 14 |
| 2016 | 19 | 19 |
| 2017 | 6 | 8 |
| 2018 | 20 | 12 |
| 2019 | 14 | 17 |
| 2020 | 15 | 16 |
| 2021 | 17 | 16 |
| 2022 | 11 | 12 |
| 2023 | 19 | 17 |
| 2024 | 14 | 15 |
| 2025 | 8 | 19 |
| 2026 | 9 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optical measurement apparatus and optical measurement method29 Sep 2026US 12,748,039 B2Samsung Electronics Co., Ltd.
- Measurement system with detection mechanism and method of operation thereof28 Jul 2026US 12,693,210 B1Park Systems Corp.
- Spectroscopic ellipsometry system for thin film imaging9 Jun 2026US 12,650,375 B2Bruker Nano, Inc.
- Split prism silicon-based liquid immersion microchannel measuring device and method12 May 2026US 12,625,064 B2Korea Research Institute of Standards and Science
- Optical metrology with nuisance feature mitigation17 Mar 2026US 12,581,914 B2Onto Innovation Inc.
- Multiple Azimuth, Multiple Pass Optical Measurements Of Semiconductor Structures1 Oct 2026US 2026/0298807 A1
- Functional layer inspection method and functional layer inspection device10 Sep 2026US 2026/0266712 A1Samsung Display Co., Ltd.
- Multi-Function Optical Analyzer27 Aug 2026US 2026/0251553 A1Board of Trustees of Michigan State University
- Simultaneous, Multiple Channel Measurements Of Semiconductor Structures At Different Nominal Azimuth Angles23 Jul 2026US 2026/0210868 A1
- Fusion optical measurement device16 Jul 2026US 2026/0202337 A1Korea Research Institute of Standards and Science
Most cited
By later US patents
- Focused beam spectroscopic ellipsometry method and system534US 5,608,526 ATencor Instruments · 1997
- Spectroscopic scatterometer system173US 6,483,580 B1KLA-Tencor Technologies Corporation · 2002
- Measurement and control of linewidths in periodic structures using spectroscopic ellipsometry140US 5,739,909 ALucent Technologies Inc. · 1998
- Broadband spectroscopic rotating compensator ellipsometer139US 5,877,859 ATherma-Wave, Inc. · 1999
- Focused beam spectroscopic ellipsometry method and system124US 5,910,842 AKLA-Tencor Corporation · 1999