Fusion optical measurement device

A fusion optical measurement device, comprising:

• a Raman device configured to irradiate a sample with first incident light and acquire material property information of a constituent substance of the sample from Raman measurement data of the sample based on a scattered light image of scattered light scattered from the sample;
• an ellipsometer configured to irradiate the sample with second incident light and acquire structural dimension information of the sample and optical constant information of the constituent substance from ellipsometer measurement data detected by a change in a polarization state of reflected light reflected from the sample;
• and
• an artificial intelligence part configured to determine the optical constant information of the constituent substance by using one of a plurality of ellipsometer optical analysis models that use only the optical constant information of the constituent substance as a plotting variable according to a change in the material property information transmitted from the Raman device, or determine optimal structural dimension information of the sample by using one of a plurality of ellipsometer structural analysis models that use only the structural dimension information as a plotting parameter by selecting reference data of optical constants suitable for the constituent substance.