Measurement system with detection mechanism and method of operation thereof
AssigneePark Systems Corp.
InventorsHyunSik Park, Kyulee Kang, Yoonshik Kang
Life of this patent
Estimating the term…
Abstract
A method of operation of a measurement system includes: generating an encoded polarized light with a spatially-varying waveplate; generating an illumination line through a telecentric relay tilted under a condition; projecting the illumination line on a sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light; and forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
Claims20
A method of operation of a measurement system comprising:
- generating an encoded polarized light with a spatially-varying waveplate;
- generating an illumination line through a telecentric relay tilted under a condition at an angle with a surface of a sample;
- projecting the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light;
- and
- forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
A measurement system comprising:
- a spatially-varying waveplate configured to generate an encoded polarized light;
- a telecentric relay, coupled to the spatially-varying waveplate, tilted under a condition at an angle with a surface of a sample and configured to generate an illumination line and project the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light;
- and
- a linear detector array, coupled to the telecentric relay, configured to form a line image of the illumination line for testing the sample based on the line image.
A non-transitory computer-readable medium storing an instruction that, when executed by a control circuit of a measurement system, causes the control circuit to perform functions comprising:
- generating an encoded polarized light with a spatially-varying waveplate;
- generating an illumination line through a telecentric relay tilted under a condition at an angle with a surface of a sample;
- projecting the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light;
- and
- forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
Dependencies are inferred from the claim text.