Optical measurement apparatus and optical measurement method

An optical measurement apparatus, comprising:

• a stage configured to support a sample;
• a first light source configured to generate a first light having a first wavelength, the first light comprising pulsed light;
• a second light source configured to generate a second light having a second wavelength shorter than the first wavelength;
• an illumination optics comprising at least one mirror or lens and configured to emit the first light and the second light on a surface of the sample;
• a light receiving optics comprising at least one mirror or lens configured to receive first reflected light of the first light that is reflected from the surface of the sample and second reflected light of the second light that is reflected from the surface of the sample;
• a physical property detector configured to obtain physical property information of the sample by detecting a change in an amount of light of the second light due to a photothermal effect of the first light on the surface of the sample;
• and
• at least one structure detector configured to obtain structural information of the sample by detecting at least one of the first reflected light and the second reflected light received by the light receiving optics.