Functional layer inspection method and functional layer inspection device

A functional layer inspection device comprising:

• an incident part configured to provide light to a sample;
• a receiving part configured to collect light reflected from the sample;
• and
• a computing module configured to detect, correct, and compute the light collected from the receiving part,
• wherein the sample includes a first material and a second material,
• the computing module includes:
• a first computing part configured to model an optical spectrum of the sample;
• a second computing part configured to grade the sample into a plurality of layers in a thickness direction of the sample;
• a third computing part configured to measure inhomogeneity of peak changes in the optical spectrum of each of the plurality of layers;
• and
• a fourth computing part configured to calculate an analysis value to calculate content of the first material of the sample.