G01B 11/30
Measuring arrangements characterised by the use of optical techniques: for measuring roughness
Official title: for measuring roughness or irregularity of surfaces
G01B11/30 (Measuring arrangements characterised by the use of optical techniques: for measuring roughness) appears on 1,622 US grants and 1,435 published applications in this corpus.
Search patents in G01B- Granted patents
- 1,622
- Published applications
- 1,435
- Assignees
- 972
- Inventors
- 3,764
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 5 | 0 |
| 1978 | 11 | 0 |
| 1979 | 8 | 0 |
| 1980 | 11 | 0 |
| 1981 | 7 | 0 |
| 1982 | 10 | 0 |
| 1983 | 6 | 0 |
| 1984 | 6 | 0 |
| 1985 | 9 | 0 |
| 1986 | 5 | 0 |
| 1987 | 20 | 0 |
| 1988 | 23 | 0 |
| 1989 | 24 | 0 |
| 1990 | 20 | 0 |
| 1991 | 22 | 0 |
| 1992 | 22 | 0 |
| 1993 | 17 | 0 |
| 1994 | 23 | 0 |
| 1995 | 22 | 0 |
| 1996 | 30 | 0 |
| 1997 | 27 | 0 |
| 1998 | 30 | 0 |
| 1999 | 23 | 0 |
| 2000 | 28 | 0 |
| 2001 | 34 | 12 |
| 2002 | 28 | 29 |
| 2003 | 35 | 24 |
| 2004 | 40 | 52 |
| 2005 | 25 | 33 |
| 2006 | 34 | 50 |
| 2007 | 36 | 46 |
| 2008 | 41 | 31 |
| 2009 | 38 | 42 |
| 2010 | 27 | 32 |
| 2011 | 21 | 25 |
| 2012 | 26 | 29 |
| 2013 | 32 | 33 |
| 2014 | 19 | 49 |
| 2015 | 33 | 72 |
| 2016 | 46 | 52 |
| 2017 | 54 | 71 |
| 2018 | 61 | 103 |
| 2019 | 96 | 98 |
| 2020 | 104 | 96 |
| 2021 | 75 | 91 |
| 2022 | 74 | 88 |
| 2023 | 66 | 59 |
| 2024 | 65 | 75 |
| 2025 | 62 | 85 |
| 2026 | 36 | 58 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Testing system and method thereof15 Sep 2026US 12,736,335 B2Nanya Technology Corporation
- Method and apparatus for checking a connection during a laser-based connecting method11 Aug 2026US 12,703,042 B2Ford Global Technologies, LLC
- Methods and systems to measure properties of moving products in device manufacturing machines4 Aug 2026US 12,699,049 B2APPLIED Materials.Inc.
- Coating evaluation device and coating evaluation method28 Jul 2026US 12,693,227 B2Nissan Motor Co., Ltd.
- Systems, devices, and methods for compensating for shape variations when using image-based alignment to align bonding pads28 Jul 2026US 12,696,724 B2Canon Kabushiki Kaisha
- Device for measuring the flatness of a surface or the thickness of a flat glass panel8 Oct 2026US 2026/0309481 A1
- Methods and apparatuses for obtaining a calibration for a substrate topography measurement and methods and apparatuses for determining a topography of a substrate using the calibration8 Oct 2026US 2026/0310100 A1ASML Netherlands B. V.
- Spectral reflectometry sensor for a feedback loop in the polishing of material samples1 Oct 2026US 2026/0298627 A1Georgia Tech Research Corporation
- Measuring of surface deformations on glass surfaces1 Oct 2026US 2026/0298838 A1Viprotron GmbH
- Top plate for cooking device, production method therefor, and method for assessing charring24 Sep 2026US 2026/0285745 A1Nippon Electric Glass Co., Ltd.
Most cited
By later US patents
- Optical end point detection methods in semiconductor planarizing polishing processes265US 5,413,941 AMicron Technology, Inc. · 1995
- Method for broad wavelength scatterometry233US 5,867,276 ABio-Rad Laboratories, Inc. · 1999
- Method for the scanning confocal light-optical microscopic and indepth examination of an extended field and devices for implementing said method226US 4,965,441 ACommissariat A L' Energie Atomique · 1990
- Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry206US 6,359,692 B1Zygo Corporation · 2002
- Instrument for measuring the topography of a surface200US 4,764,016 A1988