Methods and systems to measure properties of moving products in device manufacturing machines

A method comprising:

• directing a first light, produced by a first source of light, to a first location on a surface of a moving product, the product being transported to or from a processing chamber, wherein the first light is to generate, at the first location, a first reflected light;
• generating, while the product is in motion, by a first optical sensor, a first data representative of a first reflected light;
• determining, based at least on the first data, a misalignment of the product caused by transportation of the product and comprising at least one of:
• a vertical displacement of the product, or
• a tilt of the product;
• and
• determining, using the first data, a property of the product.

A semiconductor manufacturing system, comprising:

• a plurality of chambers comprising:
• one or more processing chambers, and
• a transfer chamber interfacing the one or more processing chambers;
• a first source of light to:
• direct a first light to a first location on a surface of a product, the product being transported between at least two of the plurality of chambers, the first light generating, at the first location, a first reflected light;
• a first optical sensor to:
• generate, while the product is in motion, a first data representative of a first reflected light;
• and
• a processing device, in communication with the first optical sensor, to:
• determine, based at least on the first data, a misalignment of the product caused by transportation of the product and comprising at least one of:
• a vertical displacement of the product, or
• a tilt of the product;
• and
• determine, using the first data, a property of the product.