G01B 11/0641
With measurement of polarization
Official title: {with measurement of polarization}
G01B11/0641 (With measurement of polarization) appears on 329 US grants and 275 published applications in this corpus.
Search patents in G01B- Granted patents
- 329
- Published applications
- 275
- Assignees
- 175
- Inventors
- 722
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 3 | 0 |
| 1988 | 0 | 0 |
| 1989 | 4 | 0 |
| 1990 | 4 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 4 | 0 |
| 1994 | 5 | 0 |
| 1995 | 6 | 0 |
| 1996 | 4 | 0 |
| 1997 | 4 | 0 |
| 1998 | 4 | 0 |
| 1999 | 10 | 0 |
| 2000 | 4 | 0 |
| 2001 | 11 | 4 |
| 2002 | 10 | 12 |
| 2003 | 14 | 8 |
| 2004 | 10 | 12 |
| 2005 | 12 | 17 |
| 2006 | 8 | 15 |
| 2007 | 17 | 9 |
| 2008 | 19 | 7 |
| 2009 | 8 | 14 |
| 2010 | 15 | 9 |
| 2011 | 8 | 10 |
| 2012 | 8 | 5 |
| 2013 | 7 | 9 |
| 2014 | 7 | 6 |
| 2015 | 5 | 8 |
| 2016 | 6 | 11 |
| 2017 | 8 | 5 |
| 2018 | 8 | 9 |
| 2019 | 10 | 13 |
| 2020 | 14 | 18 |
| 2021 | 15 | 14 |
| 2022 | 11 | 15 |
| 2023 | 11 | 15 |
| 2024 | 8 | 14 |
| 2025 | 15 | 11 |
| 2026 | 4 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Second harmonic generation (SHG) measurement device and measurement method using the same1 Sep 2026US 12,723,863 B2Samsung Electronics Co., Ltd.
- Method for analyzing thin film and device for analyzing thin film25 Aug 2026US 12,716,709 B2Samsung Display Co., Ltd.
- Semiconductor process device and method of monitoring semiconductor process19 May 2026US 12,635,455 B2Samsung Electronics Co., Ltd.
- Systems and methods for concurrent measurements of interferometric and ellipsometric signals of multi-layer thin films24 Mar 2026US 12,584,852 B2Nanoverse Technologies Ltd
- Device and method for measuring a substrate11 Nov 2025US 12,467,850 B2EV Group E. Thallner GmbH
- Multi-Function Optical Analyzer27 Aug 2026US 2026/0251553 A1Board of Trustees of Michigan State University
- Systems and methods for concurrent measurements of interferometric and ellipsometric signals of multi-layer thin films30 Jul 2026US 2026/0219168 A1Nanoverse Technologies Ltd
- Automation method for thin film measurement and analysis and apparatus for the same9 Jul 2026US 2026/0194342 A1Samsung Electronics Co., Ltd.
- Device and method for measuring a substrate5 Feb 2026US 2026/0036511 A1EV Group E. Thallner GmbH
- Imaging ellipsometer for areal layer thickness measurement of a sample and method using an imaging ellipsometer29 Jan 2026US 2026/0029331 A1Technische Universitaet Wien
Most cited
By later US patents
- Method and apparatus for evaluating the thickness of thin films189US 5,181,080 ATherma-Wave, Inc. · 1993
- High resolution monitoring of CD variations176US 7,933,026 B2KLA-Tencor Corporation · 2011
- Spectroscopic scatterometer system173US 6,483,580 B1KLA-Tencor Technologies Corporation · 2002
- Thin film optical measurement system and method with calibrating ellipsometer154US 5,798,837 ATherma-Wave, Inc. · 1998
- Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices150US 5,412,473 ATherma-Wave, Inc. · 1995