C30B 31/165
Diffusion sources
Official title: {Diffusion sources}
C30B31/165 (Diffusion sources) appears on 34 US grants and 2 published applications in this corpus.
Search patents in C30B- Granted patents
- 34
- Published applications
- 2
- Assignees
- 16
- Inventors
- 45
- Latest grant
- 17 Apr 2018
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 12 | 0 |
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 5 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 1 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Semiconductor structure and method17 Apr 2018US 9,945,048 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Diffusion system18 Nov 2008US 7,452,423 B2Samsung Electronics Co., Ltd.
- Low temperature P.sub.2 O.sub.5 oxide diffusion source12 Aug 1997US 5,656,541 ATechneglas, Inc.
- Low temperature P.sub.2 O.sub.5 oxide diffusion source27 Sep 1994US 5,350,461 ATechneglas, Inc.
- Chemical refill system25 Dec 1990US 4,979,643 AAir Products and Chemicals, Inc.
Most cited
By later US patents
- Vapor mass flow control system702US 4,436,674 AJ. C. Schumacher Co. · 1984
- Vapor mass flow control system629US 4,393,013 AJ. C. Schumacher Co. · 1983
- Chemical refill system42US 4,979,643 AAir Products and Chemicals, Inc. · 1990
- Method of manufacturing a semiconductor device by vapor phase deposition using multiple inlet flow control28US 4,748,135 AU. S. Philips Corporation · 1988
- Deposition and diffusion source control means and method24US 4,517,220 AMotorola, Inc. · 1985