C30B 31/103
Mechanisms for moving either the charge or heater
Official title: {Mechanisms for moving either the charge or heater}
C30B31/103 (Mechanisms for moving either the charge or heater) appears on 27 US grants and 1 published applications in this corpus.
Search patents in C30B- Granted patents
- 27
- Published applications
- 1
- Assignees
- 19
- Inventors
- 40
- Latest grant
- 28 Jun 1994
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 6 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 3 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor28 Jun 1994US 5,324,331 A
- Heated plate rapid thermal processor12 Oct 1993US 5,252,807 A
- Vertical heat treatment apparatus22 Jun 1993US 5,221,201 ATokyo Electron Sagami Limited
- Semiconductor processing furnace door alignment apparatus and method11 May 1993US 5,208,961 ANational Semiconductor Corporation
- Semiconductor wafer-processing apparatus3 Dec 1991US 5,069,591 ATel Sagami Limited
Most cited
By later US patents
- Semiconductor wafer-processing apparatus425US 5,069,591 ATel Sagami Limited · 1991
- Semiconductor processing furnace door alignment apparatus and method321US 5,208,961 ANational Semiconductor Corporation · 1993
- Heated plate rapid thermal processor228US 5,252,807 A1993
- Processing apparatus and method104US 4,911,103 ATexas Instruments Incorporated · 1990
- Heated plate rapid thermal processor62US 5,060,354 A1991