US 5,208,961 A · Semiconductor processing furnace door alignment apparatus and method

Abstract

Wafer processing furnace apparatus for providing adjustability for a door sealed to the furnace, the furnace being of the type having a door through which a wafer paddle is disposed. An alignment collar is disposed in the furnace door and having a bore through which the wafer paddle passes. The bore is offset so that when the collar is rotated, the door is moved in a plane perpendicular to the paddle axis. The door includes a seal assembly, including a bellows that is sealed with an O-ring at one end of the door, and sealed with an O-ring at another end to an alignment plate which also has an offset bore. The alignment plate and the bellows is rotated in correspondence with the alignment collar when adjusting the door to prevent tilting thereof. The alignment plate is fastened to an attachment plate which is fixed to the wafer paddle.

Claims22

Dependent claims

Furnace door alignment apparatus, comprising:

a furnace door movable with respect to an opening in said furnace, said door having an opening through which paddle apparatus is disposed so that said paddle apparatus is located in the furnace while said door is sealed to the furnace opening;
and
an alignment collar supporting said paddle apparatus with respect to said furnace door, said alignment collar having a bore therein through which said paddle apparatus passes, and said bore being offset from a central axis of said alignment collar so that when said alignment collar is rotated about said paddle apparatus, said door is moved with respect to said central axis.

Furnace door alignment apparatus for use with a water processing furnace, comprising:

a furnace door movable with respect to an opening in said furnace, said door having an openign through which padde apparatus is disposed so that said paddle apparatus is disposed in the furnace while said door is sealed to the furnace opening;
an attachment plate fixed with respect to said paddle apparatus;
an alignment plate having a central axis, and a bore in said alignment plate offset with respect to said central plate axis, said alignment plate bore being sized for passing the paddle apparatus therethrough;
an alignment collar having a central axis, and a bore in said alignment collar being offset with respect to said alignment collar central axis, said alignment collar bore supporting the paddle apparatus and fitting within the opening in said furnace door;
a bellows having a front end sealed to said furnace door, and a back end with a seal arrangement engageable with the offset bore in said alignment plate;
means for selaing the furnace door to said wafer processing furnace;
and
said alignment plate and said alignment collar being movable at desired angular positions with respect to said paddle apparatus.

5 more elements

Dependencies are inferred from the claim text.

Semiconductor processing furnace door alignment apparatus and method

Life of this patent

Semiconductor processing furnace door alignment apparatus and method

Life of this patent

Abstract

Claims22