Semiconductor wafer-processing apparatus

A semiconductor wafer-processing apparatus which comprises:

• a plurality of support members provided respectively for processing units of a processing apparatus, and designed for supporting wafer receptacles each containing semiconductor wafers;
• receptacle-inserting/extracting means for inserting a wafer receptacle from the support members into the processing units, and for extracting the wafer receptacle from the processing units back to the support members;
• and
• receptacle-inserting/extracting means, for transporting the wafer receptacle between each support member and a predetermined position;
• wherein said receptacle-transporting means comprises a horizontal transport mechanism and an elevator mechanism for vertically moving the horizontal transport mechanism, said horizontal transport mechanism including a fixed arm, a horizontally movable arm extending parallel to the fixed arm and having means for supporting the wafer receptacle, and a pair of connecting arms connecting the fixed arm and the horizontally movable arm, forming a parallel link, wherein said wafer receptacle supporting means comprises movable holders movable toward, and away from, each other, to hold, and release, the wafer receptacle at both ends thereof.