C23F 1/10
Etching compositions
Official title: Etching compositions (C23F1/44 takes precedence)
C23F1/10 (Etching compositions) appears on 1,863 US grants and 2,021 published applications in this corpus.
Search patents in C23F- Granted patents
- 1,863
- Published applications
- 2,021
- Assignees
- 912
- Inventors
- 4,457
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 16 | 0 |
| 1977 | 9 | 0 |
| 1978 | 10 | 0 |
| 1979 | 10 | 0 |
| 1980 | 11 | 0 |
| 1981 | 8 | 0 |
| 1982 | 10 | 0 |
| 1983 | 16 | 0 |
| 1984 | 21 | 0 |
| 1985 | 13 | 0 |
| 1986 | 11 | 0 |
| 1987 | 9 | 0 |
| 1988 | 15 | 0 |
| 1989 | 15 | 0 |
| 1990 | 24 | 0 |
| 1991 | 15 | 0 |
| 1992 | 18 | 0 |
| 1993 | 22 | 0 |
| 1994 | 16 | 0 |
| 1995 | 16 | 0 |
| 1996 | 15 | 0 |
| 1997 | 8 | 0 |
| 1998 | 14 | 0 |
| 1999 | 25 | 0 |
| 2000 | 29 | 0 |
| 2001 | 27 | 15 |
| 2002 | 54 | 53 |
| 2003 | 54 | 48 |
| 2004 | 41 | 66 |
| 2005 | 24 | 63 |
| 2006 | 42 | 62 |
| 2007 | 27 | 42 |
| 2008 | 26 | 58 |
| 2009 | 26 | 52 |
| 2010 | 31 | 60 |
| 2011 | 38 | 62 |
| 2012 | 45 | 69 |
| 2013 | 59 | 67 |
| 2014 | 49 | 84 |
| 2015 | 82 | 139 |
| 2016 | 83 | 118 |
| 2017 | 59 | 94 |
| 2018 | 86 | 109 |
| 2019 | 97 | 105 |
| 2020 | 84 | 114 |
| 2021 | 87 | 113 |
| 2022 | 82 | 109 |
| 2023 | 76 | 104 |
| 2024 | 87 | 81 |
| 2025 | 77 | 78 |
| 2026 | 44 | 56 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Composition and method for treating substrate6 Oct 2026US 12,753,342 B2FUJIFILM Corporation
- Method for forming robust hydrophobic surfaces on steel workpiece6 Oct 2026US 12,753,490 B2Hong Kong Applied Science and Technology Research Institute Company Limited
- Continuous coil pretreatment process6 Oct 2026US 12,753,515 B2Arconic Technologies LLC
- Production method for etching liquid composition6 Oct 2026US 12,753,516 B2Kao Corporation
- Substrate processing apparatus and substrate processing method18 Aug 2026US 12,713,865 B2Tokyo Electron Limited
- Continuous coil pretreatment process8 Oct 2026US 2026/0308766 A1Arconic Technologies LLC
- Vapor-phase etch of metal-containing materials8 Oct 2026US 2026/0308770 A1Versum Materials US, LLC
- Etchant composition, method of patterning metal layer and method of producing display device using the same1 Oct 2026US 2026/0297755 A1Dongwoo Fine-Chem Co., Ltd.
- Atomic layer etching method for metal oxide film24 Sep 2026US 2026/0286531 A1SK Specialty Co., Ltd
- Silicon nitride etching composition and method17 Sep 2026US 2026/0275191 A1Entegris, Inc.
Most cited
By later US patents
- Method for manufacturing porous structure and method for forming pattern645US 6,565,763 B1Kabushiki Kaisha Toshiba · 2003
- Oxide and metal removal562US 9,309,598 B2APPLIED Materials.Inc. · 2016
- Temperature resistant abrasive compact and method for making same436US 4,224,380 AGeneral Electric Company · 1980
- Golf club head with a face composed of a forged material388US 6,354,962 B1Callaway Golf Company · 2002
- Low temperature system and method for CVD copper removal383US 5,897,379 ASharp Kabushiki Kaisha · 1999