Composition and method for treating substrate
AssigneeFUJIFILM Corporation
InventorsMoe Narita, Atsushi Mizutani
Life of this patent
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Abstract
An object of the present invention is to provide a composition that leaves few residues in a case where the composition is brought into contact with a Ru-containing substance to perform an etching treatment on the Ru-containing substance, and to provide a method for treating a substrate. The composition according to an embodiment of the present invention contains one or more periodic acid compounds selected from the group consisting of a periodic acid and a salt thereof, a quaternary ammonium salt represented by Formula (A), and a trialkylamine or a salt thereof.
Claims19
A composition comprising:
- one or more periodic acid compounds selected from the group consisting of a periodic acid and a salt thereof,
- a quaternary ammonium salt represented by Formula (A);
- and
- a compound having at least one anion selected from the group consisting of IO3−, I−, and I3−;
- and
- a trialkylamine or a salt thereof,
- in Formula (A), Ra to Rd each independently represent an alkyl group which may have a substituent, n represents an integer of 1 or 2, and Xn− represents Br−, Cl−, F−, CH3COO−, HSO4−, OH−, NO3−, or SO42−,
- wherein a mass ratio of a content of the trialkylamine to a total mass of the anion in the compound having the anion is 1×10−5 to 1×105.
A composition comprising:
- one or more periodic acid compounds selected from the group consisting of a periodic acid and a salt thereof;
- a quaternary ammonium salt represented by Formula (A);
- and
- a trialkylamine or a salt thereof,
- in Formula (A), Ra to Ra each independently represent an alkyl group which may have a substituent, n represents an integer of 1 or 2, and Xn−represents Br−, Cl−, F−, CH3COO−, HSO4−, OH−, NO3−, or SO42−,
- wherein a content of the trialkylamine or a salt thereof is 1.0 ppb by mass to 1.5% by mass with respect to a total mass of the composition, and
- a pH of the composition is 4.0 to 8.0.
Dependencies are inferred from the claim text.