C23C 18/145
Radiation by charged particles
Official title: {Radiation by charged particles, e.g. electron beams or ion irradiation}
C23C18/145 (Radiation by charged particles) appears on 69 US grants and 91 published applications in this corpus.
Search patents in C23C- Granted patents
- 69
- Published applications
- 91
- Assignees
- 70
- Inventors
- 254
- Latest grant
- 24 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 1 |
| 2002 | 3 | 4 |
| 2003 | 4 | 2 |
| 2004 | 3 | 4 |
| 2005 | 3 | 3 |
| 2006 | 1 | 2 |
| 2007 | 2 | 4 |
| 2008 | 1 | 9 |
| 2009 | 1 | 8 |
| 2010 | 2 | 10 |
| 2011 | 3 | 5 |
| 2012 | 7 | 0 |
| 2013 | 3 | 1 |
| 2014 | 3 | 0 |
| 2015 | 3 | 7 |
| 2016 | 0 | 5 |
| 2017 | 2 | 1 |
| 2018 | 2 | 2 |
| 2019 | 1 | 4 |
| 2020 | 1 | 3 |
| 2021 | 2 | 4 |
| 2022 | 0 | 4 |
| 2023 | 5 | 5 |
| 2024 | 6 | 1 |
| 2025 | 0 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Methods and systems for depositing a layer24 Mar 2026US 12,584,221 B2ASM IP Holding B. V.
- Barrier film24 Sep 2024US 12,098,258 B2LG Chem.Ltd.
- Barrier film17 Sep 2024US 12,091,519 B2LG Chem.Ltd.
- Systems and methods of electron beam induced processing13 Aug 2024US 12,059,698 B2Georgia Tech Research Corporation
- Barrier film11 Jun 2024US 12,006,575 B2LG Chem.Ltd.
- Plasma induced crystallization and densification of amorphous coatings7 May 2026US 2026/0124643 A1Schott AG
- Vacuum-integrated hardmask processes and apparatus13 Feb 2025US 2025/0053080 A1Lam Research Corporation
- Method and a device for applying a metallic coating to a surface12 Dec 2024US 2024/0410056 A1Midnex AG
- Fully open-air combustion deposition and rapid plasma treatment of metal oxides21 Dec 2023US 2023/0407475 A1The Board of Trustees of the Leland Stanford Junior University
- Vacuum-integrated hardmask processes and apparatus31 Aug 2023US 2023/0273516 A1Lam Research Corporation
Most cited
By later US patents
- Vacuum-integrated hardmask processes and apparatus389US 9,778,561 B2Lam Research Corporation · 2017
- Laser direct writing75US 5,378,508 AAkzo Nobel N. V. · 1995
- Patterned deposition of metals via photochemical decomposition of metal-oxalate complexes51US 5,281,447 AInternational Business Machines Corporation · 1994
- Vacuum-integrated hardmask processes and apparatus38US 10,831,096 B2Lam Research Corporation · 2020
- Vacuum-integrated hardmask processes and apparatus35US 10,514,598 B2Lam Research Corporation · 2019