C23C 18/14
Decomposition by irradiation
Official title: Decomposition by irradiation, e.g. photolysis, particle radiation {or by mixed irradiation sources}
C23C18/14 (Decomposition by irradiation) appears on 361 US grants and 429 published applications in this corpus.
Search patents in C23C- Granted patents
- 361
- Published applications
- 429
- Assignees
- 275
- Inventors
- 1,113
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 3 | 0 |
| 1991 | 7 | 0 |
| 1992 | 3 | 0 |
| 1993 | 3 | 0 |
| 1994 | 1 | 0 |
| 1995 | 6 | 0 |
| 1996 | 5 | 0 |
| 1997 | 5 | 0 |
| 1998 | 4 | 0 |
| 1999 | 10 | 0 |
| 2000 | 7 | 0 |
| 2001 | 6 | 5 |
| 2002 | 7 | 10 |
| 2003 | 10 | 12 |
| 2004 | 13 | 22 |
| 2005 | 8 | 19 |
| 2006 | 8 | 15 |
| 2007 | 6 | 19 |
| 2008 | 12 | 25 |
| 2009 | 9 | 29 |
| 2010 | 20 | 33 |
| 2011 | 15 | 25 |
| 2012 | 20 | 21 |
| 2013 | 16 | 27 |
| 2014 | 18 | 10 |
| 2015 | 17 | 24 |
| 2016 | 8 | 19 |
| 2017 | 15 | 6 |
| 2018 | 10 | 12 |
| 2019 | 9 | 15 |
| 2020 | 11 | 14 |
| 2021 | 9 | 22 |
| 2022 | 10 | 11 |
| 2023 | 12 | 12 |
| 2024 | 17 | 10 |
| 2025 | 5 | 5 |
| 2026 | 4 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Tunable nano-structured inkjet printed graphene via UV pulsed-laser irradiation for electrochemical sensing8 Sep 2026US 12,729,442 B1Iowa State University Research Foundation, Inc.
- Conductive traces5 May 2026US 12,621,936 B2Peridot Print LLC
- Methods and systems for depositing a layer24 Mar 2026US 12,584,221 B2ASM IP Holding B. V.
- Depositing of material by spraying precursor using supercritical fluid27 Jan 2026US 12,533,707 B2Nova Engineering Films, Inc.
- Methods of electrochemical deposition14 Oct 2025US 12,442,098 B2
- Electron shower induced deposition systems, methods of use thereof, and methods of making nanostructures8 Oct 2026US 2026/0307101 A1Georgia Tech Research Corporation
- Methods of electrochemical deposition20 Aug 2026US 2026/0242969 A1
- Depositing of material by spraying precursor using supercritical fluid7 May 2026US 2026/0124639 A1Nova Engineering Films, Inc.
- Plasma induced crystallization and densification of amorphous coatings7 May 2026US 2026/0124643 A1Schott AG
- Chemical vapor deposition process and coating7 May 2026US 2026/0129933 A1Silcotek Corp.
Most cited
By later US patents
- Vacuum-integrated hardmask processes and apparatus389US 9,778,561 B2Lam Research Corporation · 2017
- Apparatuses and method for maskless mesoscale material deposition185US 7,045,015 B2Optomec Design Company · 2006
- Apparatuses and methods for maskless mesoscale material deposition138US 7,485,345 B2Optomec Design Company · 2009
- Method for photo-forming small shaped metal containing articles from porous precursors136US 5,512,162 AMassachusetts Institute of Technology · 1996
- Method and apparatus for material deposition120US 5,456,945 ASymetrix Corporation · 1995