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US 2026/0307101 A1Published application
Electron shower induced deposition systems, methods of use thereof, and methods of making nanostructures
AssigneeGeorgia Tech Research Corporation
InventorsAndrei G. FEDOROV, Auwais AHMED, Erik C. BOYLE, Peter Arthur KOTTKE
Life of this patent
Estimating the term…
Abstract
The present disclosure provides for methods and systems for making structures using a broad electron shower that interacts with a liquid in a high or low vacuum environment. The present disclosure provides for methods and systems for growing of high aspect ratio structures with three-dimensional topological complexity quickly by directing a liquid into an electron shower.
Claims22
A system comprising:
- a broad electron beam system for generating a shower of electrons, wherein the shower of electrons has a width of about 1 mm to 1 cm and a length of about 1 mm to 1 cm, wherein the shower of electrons has an energy of about 10 eV to 10 keV with a current of about 1 pA to 1 mA;
- and
- a spray system for directing a stream of liquid or liquid jet or liquid droplets into the shower of electrons, wherein the shower of electrons and stream of liquid or liquid jet or liquid droplets are under a pressure of about 10−6 bar to 760 Torr, wherein a portion of the shower of electrons collide with the stream of liquid or liquid jet or liquid droplets, wherein a solid nano-matter is formed via the chemical reactions in the stream of liquid or liquid jet or liquid droplets during interactions with the electron shower and forming a solid structure on collision with a substrate.
(canceled)
A method, comprising:
- directing a stream of liquid or liquid jet or liquid droplets towards a shower of electrons, where a portion of the shower of electrons collide with the liquid stream or liquid jet or liquid droplets, and
- forming a nano-matter as a result of the shower of electrons interacting with the liquid stream or liquid jet or liquid droplets which collide with a substrate and forming a solid structure,
- wherein the shower of electrons, the liquid, and the structure are under a pressure of about 10−6 bar to 760 Torr, wherein the shower of electrons have an energy of about 10 eV to 10 keV with a current of about 1 pA to 10 μA.
22-43. (canceled)
Dependencies are inferred from the claim text.