C23C 14/221
Ion beam deposition
Official title: {Ion beam deposition (C23C14/46, C23C14/48 take precedence)}
C23C14/221 (Ion beam deposition) appears on 367 US grants and 384 published applications in this corpus.
Search patents in C23C- Granted patents
- 367
- Published applications
- 384
- Assignees
- 217
- Inventors
- 885
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 2 | 0 |
| 1979 | 2 | 0 |
| 1980 | 3 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 4 | 0 |
| 1989 | 9 | 0 |
| 1990 | 4 | 0 |
| 1991 | 5 | 0 |
| 1992 | 7 | 0 |
| 1993 | 7 | 0 |
| 1994 | 8 | 0 |
| 1995 | 9 | 0 |
| 1996 | 6 | 0 |
| 1997 | 5 | 0 |
| 1998 | 9 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 1 | 1 |
| 2002 | 5 | 10 |
| 2003 | 7 | 9 |
| 2004 | 9 | 7 |
| 2005 | 5 | 5 |
| 2006 | 3 | 10 |
| 2007 | 3 | 8 |
| 2008 | 1 | 2 |
| 2009 | 2 | 14 |
| 2010 | 4 | 7 |
| 2011 | 6 | 16 |
| 2012 | 10 | 12 |
| 2013 | 8 | 21 |
| 2014 | 9 | 9 |
| 2015 | 13 | 31 |
| 2016 | 15 | 30 |
| 2017 | 17 | 29 |
| 2018 | 27 | 29 |
| 2019 | 24 | 20 |
| 2020 | 23 | 16 |
| 2021 | 13 | 15 |
| 2022 | 12 | 24 |
| 2023 | 14 | 20 |
| 2024 | 9 | 10 |
| 2025 | 18 | 15 |
| 2026 | 11 | 14 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electronic device including s-shaped staggered contacts8 Sep 2026US 12,729,429 B2APPLIED Materials.Inc.
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Ion beam deposition of ruthenium thin films30 Jun 2026US 12,668,867 B2Veeco Instruments Inc.
- Virtual shutter in ion beam system30 Jun 2026US 12,671,062 B2Plasma-Therm NES LLC
- Rotary mount in a coating apparatus23 Jun 2026US 12,662,733 B1Meta Platforms Technologies, LLC
- Yttrium-containing protective film, method for producing same, and component17 Sep 2026US 2026/0275491 A1AGC Inc.
- Ion beam deposition system for ruthenium thin films17 Sep 2026US 2026/0275493 A1Veeco Instruments Inc.
- Ion beam deposition of ruthenium film17 Sep 2026US 2026/0275494 A1Veeco Instruments Inc.
- Method for manufacturing superconducting wire3 Sep 2026US 2026/0260788 A1Sumitomo Electric Industries, Ltd.
- Single neutralizer for dual ion beam system20 Aug 2026US 2026/0242928 A1Veeco Instruments Inc.
Most cited
By later US patents
- Process for surface treatment519US 4,857,137 AHitachi, Ltd. · 1989
- Ion source231US 6,645,301 B2Saintech Pty Ltd. · 2003
- Mask for increased uniformity in ion beam deposition148US 8,308,921 B1Western Digital (Fremont), LLC · 2012
- Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films120US 5,352,493 A1994
- Diamond-like metallic nanocomposites118US 5,466,431 A1995