Electronic device including s-shaped staggered contacts
AssigneeApplied Materials, Inc.
InventorsM. Arif Zeeshan, Kelvin Chan, Shantanu Kallakuri, Sony Varghese
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Abstract
An electronic device including an active device region, disposed at least partially in a first level, the active device region comprising an array of active device features, an array of device structures, disposed in a second level, above the first level, and a contact level, comprising an array of staggered contacts, wherein the array of staggered contacts electrically connect the array of active device features to the array of device structures, and wherein the array of staggered contacts are characterized by an S-shaped cross-section.
Claims6
An electronic device, comprising:
- an active device region, disposed at least partially in a first level, the active device region comprising an array of active device features;
- a contact level, disposed above the first level and comprising an array of contacts;
- and
- an array of device structures, disposed in a second level above the contact level;
- wherein the array of contacts electrically connect the array of active device features in the first level to the array of device structures in the second level, and wherein the array of contacts are characterized by an S-shaped cross-section.
An electronic device, comprising:
- an active device region, disposed at least partially in a first level, the active device region comprising an array of active device features;
- a contact level, disposed above the first level and comprising an array of contacts;
- and
- an array of device structures, disposed in a second level above the contact level;
- wherein the array of contacts electrically connect the array of active device features in the first level to the array of device structures in the second level, and wherein the array of contacts are characterized by an S-shaped cross-section,
- wherein the electronic device comprises a memory device, wherein the array of devices structures comprises an array of capacitors, wherein the first level and the second level extend parallel to a substrate plane, wherein a given capacitor of the array of capacitors is electrically connected by a given staggered contact to a given active device feature, and wherein an entirety of the given capacitor does not overlap the active device feature within the substrate plane.
Dependencies are inferred from the claim text.