B81C 99/005
Test apparatus
Official title: {Test apparatus}
B81C99/005 (Test apparatus) appears on 68 US grants and 72 published applications in this corpus.
Search patents in B81C- Granted patents
- 68
- Published applications
- 72
- Assignees
- 53
- Inventors
- 209
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 2 |
| 2003 | 4 | 1 |
| 2004 | 5 | 4 |
| 2005 | 1 | 4 |
| 2006 | 3 | 3 |
| 2007 | 1 | 1 |
| 2008 | 5 | 6 |
| 2009 | 1 | 4 |
| 2010 | 3 | 3 |
| 2011 | 2 | 6 |
| 2012 | 0 | 0 |
| 2013 | 4 | 5 |
| 2014 | 2 | 7 |
| 2015 | 2 | 6 |
| 2016 | 8 | 3 |
| 2017 | 8 | 3 |
| 2018 | 1 | 5 |
| 2019 | 5 | 2 |
| 2020 | 3 | 0 |
| 2021 | 1 | 1 |
| 2022 | 1 | 1 |
| 2023 | 1 | 0 |
| 2024 | 1 | 1 |
| 2025 | 0 | 2 |
| 2026 | 2 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Movable device, MEMS device and optical scanning apparatus8 Sep 2026US 12,730,301 B2Mitsumi Electric Co., Ltd.
- Circuit and method to detect faults of a MEMS device including an oscillating mass5 May 2026US 12,620,935 B2STMicroelectronics International N. V.
- Decoupled XY parallel micro-positioning stage1 Oct 2024US 12,106,999 B2Guangdong University of Technology
- Device and method for monitoring surface condition of contact surface of detected object25 Apr 2023US 11,634,319 B2National Taiwan University
- Testing apparatus and testing method thereof21 Jun 2022US 11,368,804 B1xMEMS Labs, Inc.
- Microstructure inspection device and system and use of the same26 Mar 2026US 2026/0086115 A1Silex Microsystems AB
- Drop test device for a micromechanical component8 Jan 2026US 2026/0008671 A1
- Electrical Measurement of MEMS Switch Beam Resonant Frequency4 Dec 2025US 2025/0368502 A1Menlo Microsystems, Inc.
- Circuit and method to detect faults of a mems device including an oscillating mass2 Jan 2025US 2025/0007463 A1STMicroelectronics International N. V.
- Movable device, mems device and optical scanning apparatus4 Jan 2024US 2024/0004185 A1Mitsumi Electric Co., Ltd.
Most cited
By later US patents
- Method and apparatus for amplifying electrical test signals from a micromechanical device67US 6,232,790 B1Honeywell Inc. · 2001
- Method and system for automated on-chip material and structural certification of MEMS devices54US 6,567,715 B1Sandia Corporation · 2003
- Microelectromechanical integrated microloading device42US 5,786,621 ACornell Research Foundation, Inc. · 1998
- Testing MEM device array39US 7,026,821 B2Hewlett-Packard Development Company, L. P. · 2006
- Micromachined shock sensor36US 6,619,123 B2Wisconsin Alumni Research Foundation · 2003