Decoupled XY parallel micro-positioning stage

A decoupled XY parallel micro-positioning stage, comprising:

• a central moving platform;
• a plurality of fixed mechanisms;
• a plurality of micro-displacement amplification mechanisms;
• a plurality of four-bar symmetrical flexible guide mechanisms;
• and
• a piezoelectric ceramic;
• wherein the plurality of micro-displacement amplification mechanisms are symmetrically arranged with respect to an X axis and a Y axis centered on the central moving platform;
• each of the plurality of fixed mechanisms is arranged between adjacent micro-displacement amplification mechanisms;
• and the plurality of fixed mechanisms are symmetrically with respect to the X axis and/or the Y axis centered on the central moving platform;
• each of the plurality of micro-displacement amplification mechanisms comprises two first longitudinal beams, two second longitudinal beams and a plurality of crossbeams;
• the two first longitudinal beams are provided in parallel and spaced apart;
• two second longitudinal beams are arranged spaced apart between the two first longitudinal beams in a direction facing the central moving platform;
• the two second longitudinal beams are respectively connected to the two first longitudinal beams via the plurality of crossbeams;
• the plurality of crossbeams are respectively connected to the two first longitudinal beams and the two second longitudinal beams via a flexible hinge;
• the piezoelectric ceramic is arranged between the two first longitudinal beams, and is connected to input ends of the two first longitudinal beams, respectively;
• an output end is provided on a second longitudinal beam of the two second longitudinal beams that is proximate to the central moving platform;
• and
• the output end is connected to the central moving platform and the plurality of fixed mechanisms respectively via the plurality of four-bar symmetrical flexible guide mechanisms.