Method and apparatus for amplifying electrical test signals from a micromechanical device

An apparatus for determining performance characteristics of a plurality of microelectromechanical devices located on a common wafer, wherein each microelectromechanical device has at least one movable mechanical member, wherein said apparatus comprises:

• at least one test probe having one end in operable electrical communication with an output of at least one of the movable mechanical members of at least one of the microelectromechanical devices for receiving electrical signals indicative of the movement of the movable mechanical member;
• an excitation probe connected to an input of at least one of the movable mechanical members of at least one of the microelectromechanical devices, wherein said excitation probe provides an electrical signal to the movable mechanical member, thereby causing the movable mechanical member to move and generate electrical output;
• an analyzer for receiving the electrical signals from said test probe at a location remote from the microelectromechanical device, wherein said analyzer analyzes the electrical signals to determine the performance characteristics of the microelectromechanical device;
• communication means for transmitting the electrical signals from the test probe to the analyzer;
• and
• an amplifier in operable electrical communication with said test probe and said communication means, wherein said amplifier is in close proximity to said test probe such that said amplifier amplifies the electrical signals prior to transmission of the electrical signals by said communication means such that the electrical signals are amplified before sufficient noise has been introduced into the electrical signals to reduce a signal to noise ratio of the electrical signals to less than 10 decibels, and wherein said analyzer determines the performance characteristics of the microelectromechanical device without initially separating the microelectromechanical device from the wafer.