Microstructure inspection device and system and use of the same

A microstructure inspection system for inspecting an electrical characteristic of at least one micro electromechanical system (MEMS) structure formed in or on a substrate, the microstructure inspection system comprising:

• at least one microstructure inspection device comprising
• a probe tip having an electrically conductive and elastically deformable probe tip surface configured to deform elastically when subjected to a force greater than a predetermined deformation threshold value;
• a probe fixation device, being arranged configured to hold the at least one microstructure inspection device;
• and,
• a substrate having at least one micro electromechanical system (MEMS) structure formed thereon or therein,
• wherein a hardness of the at least one micro electromechanical system (MEMS) structure to be inspected is higher than a hardness of the electrically conductive and elastically deformable probe tip surface of the probe tip of the respective at least one microstructure inspection device, and
• wherein one of:
• the at least one microstructure inspection device comprises a pusher configured to push the probe tip in a first direction towards the substrate, and the microstructure inspection system comprises a substrate pusher configured to push the substrate towards and against the probe tip with an abutment force that is greater than the predetermined deformation threshold value.