B81C 1/00992
Treatments or methods for avoiding stiction of flexible or moving parts of
Official title: {Treatments or methods for avoiding stiction of flexible or moving parts of MEMS not provided for in groups B81C1/0092 - B81C1/00984}
B81C1/00992 (Treatments or methods for avoiding stiction of flexible or moving parts of) appears on 12 US grants and 16 published applications in this corpus.
Search patents in B81C- Granted patents
- 12
- Published applications
- 16
- Assignees
- 6
- Inventors
- 28
- Latest grant
- 11 Nov 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 2 |
| 2018 | 1 | 1 |
| 2019 | 2 | 3 |
| 2020 | 2 | 1 |
| 2021 | 1 | 0 |
| 2022 | 2 | 1 |
| 2023 | 0 | 3 |
| 2024 | 2 | 0 |
| 2025 | 2 | 3 |
| 2026 | 0 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device25 Mar 2025US 12,258,266 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device31 Dec 2024US 12,180,069 B2InvenSense, Inc.
- Anti-stiction process for MEMS device3 Dec 2024US 12,157,667 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Systems and methods for uniform target erosion magnetic assemblies19 Jul 2022US 11,390,520 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Anti-Stiction Process for Mems Device14 May 2026US 2026/0132019 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method and system for fabricating a mems device cap11 Dec 2025US 2025/0376371 A1InvenSense, Inc.
- Method and system for fabricating a mems device8 May 2025US 2025/0145456 A1InvenSense, Inc.
- Method and system for fabricating a mems device6 Mar 2025US 2025/0074766 A1InvenSense, Inc.
- Method and system for fabricating a mems device9 Feb 2023US 2023/0037849 A1InvenSense, Inc.
Most cited
By later US patents