Y10S 438/932
Boron nitride semiconductor
Y10S438/932 (Boron nitride semiconductor) appears on 36 US grants and 17 published applications in this corpus.
Search patents in Y10S- Granted patents
- 36
- Published applications
- 17
- Assignees
- 15
- Inventors
- 38
- Latest grant
- 18 Aug 2015
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 3 | 0 |
| 1994 | 3 | 0 |
| 1995 | 4 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 1 |
| 2003 | 2 | 2 |
| 2004 | 0 | 1 |
| 2005 | 3 | 2 |
| 2006 | 2 | 3 |
| 2007 | 0 | 1 |
| 2008 | 3 | 1 |
| 2009 | 1 | 1 |
| 2010 | 1 | 0 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 1 | 1 |
| 2014 | 2 | 2 |
| 2015 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Silane or borane treatment of metal thin films18 Aug 2015US 9,111,749 B2ASM IP Holdings B.V.
- Hardmask materials30 Sep 2014US 8,846,525 B2Novellus Systems, Inc.
- Silane or borane treatment of metal thin films30 Sep 2014US 8,846,550 B1ASM IP Holding B. V.
- Hardmask materials17 Sep 2013US 8,536,073 B2Novellus Systems, Inc.
- Hardmask materials21 Aug 2012US 8,247,332 B2Novellus Systems, Inc.
- Silane or borane treatment of metal thin films2 Oct 2014US 2014/0295673 A1ASM IP Holding B. V.
- Silane or borane treatment of metal thin films18 Sep 2014US 2014/0273428 A1ASM IP Holding B. V.
- Hardmask materials12 Dec 2013US 2013/0330932 A1Novellus Systems, Inc.
- Hardmask materials1 Nov 2012US 2012/0276752 A1Novellus Systems, Inc.
- Hardmask materials9 Jun 2011US 2011/0135557 A1Novellus Systems, Inc.
Most cited
By later US patents
- Mixed metal nitride and boride barrier layers129US 6,445,023 B1Micron Technology, Inc. · 2002
- Converting ceramic materials to electrical conductors and semiconductors64US 5,145,741 A1992
- Incorporation of nitrogen into high k dielectric film42US 6,960,537 B2ASM America, Inc. · 2005
- Semiconductor heterojunction structure40US 5,117,267 ASumitomo Electric Industries, Ltd. · 1992
- Silane or borane treatment of metal thin films22US 8,846,550 B1ASM IP Holding B. V. · 2014