Y10S 206/832
Semiconductor wafer boat
Y10S206/832 (Semiconductor wafer boat) appears on 122 US grants and 53 published applications in this corpus.
Search patents in Y10S- Granted patents
- 122
- Published applications
- 53
- Assignees
- 69
- Inventors
- 187
- Latest grant
- 18 Jul 2017
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 0 | 0 |
| 1978 | 1 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 4 | 0 |
| 1985 | 5 | 0 |
| 1986 | 5 | 0 |
| 1987 | 8 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 5 | 0 |
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 0 | 0 |
| 1999 | 4 | 0 |
| 2000 | 7 | 0 |
| 2001 | 5 | 4 |
| 2002 | 4 | 4 |
| 2003 | 6 | 11 |
| 2004 | 5 | 7 |
| 2005 | 2 | 11 |
| 2006 | 10 | 1 |
| 2007 | 7 | 3 |
| 2008 | 4 | 4 |
| 2009 | 2 | 1 |
| 2010 | 2 | 1 |
| 2011 | 4 | 2 |
| 2012 | 4 | 1 |
| 2013 | 2 | 1 |
| 2014 | 0 | 1 |
| 2015 | 1 | 1 |
| 2016 | 0 | 0 |
| 2017 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Substrate storage container18 Jul 2017US 9,711,385 B2Miraial Co., Ltd.
- Wafer storing container24 Feb 2015US 8,960,442 B2Miraial Co., Ltd.
- Jet stack brazing in a diffusion furnace13 Aug 2013US 8,505,803 B2Xerox Corporation
- Method and system for mask handling in high productivity chamber6 Aug 2013US 8,500,908 B2Intermolecular, Inc.
- Method and system for mask handling in high productivity chamber27 Nov 2012US 8,317,925 B2Intermolecular, Inc.
- Substrate storage container5 Nov 2015US 2015/0318195 A1Miraial Co., Ltd.
- Wafer storing container18 Dec 2014US 2014/0367307 A1Miraial Co., Ltd.
- Method and System for Mask Handling in High Productivity Chamber21 Feb 2013US 2013/0042810 A1Intermolecular, Inc.
- Jet stack brazing in a diffusion furnace5 Jul 2012US 2012/0168490 A1Xerox Corporation
- Method and system for mask handling in high productivity chamber27 Oct 2011US 2011/0262644 A1Intermolecular, Inc.
Most cited
By later US patents
- Wafer holding, wafer support member, wafer boat and heat treatment furnace566US 7,204,887 B2Nippon Steel Corporation · 2007
- Wafer carrier517US 4,949,848 AFluoroware, Inc. · 1990
- Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same355US 6,139,983 ANGK Insulators, Ltd. · 2000
- Apparatus for growing thin films105US 6,551,406 B2ASM Microchemistry Oy · 2003
- Package65US 4,450,960 AEmpak, Inc. · 1984