Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
AssigneeNGK Insulators, Ltd.
InventorsTsuneaki Ohashi, Kiyoshi Araki, Sadanori Shimura, Yuji Katsuda
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Abstract
This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.
Claims4
A wafer-supporting member exposed to a plasma of a halogen based corrosive gas, said member comprising (1) a main body made of a material selected from the group consisting of a silicon nitride, a silicon carbide, alumina, boron carbide, silicon oxide, and an aluminum nitride and (2) a corrosion-resistant layer formed on a surface of the main body, in which the corrosion-resistant layer contains a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.
Dependencies are inferred from the claim text.