Wafer carrier
AssigneeFluoroware, Inc.
InventorRobert D. Kos
Life of this patent
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AssigneeFluoroware, Inc.
InventorRobert D. Kos
Estimating the term…
A moldable plastic, distortion and warp resistant wafer carrier having an open top for insertion and removal of wafers with opposed upright end walls. Side walls with inner opposed ribs for spacing axially aligned wafers in the carrier are provided wherein one upright end wall is H-shaped with a horizontal indexing bar extending thereacross intermediate the height of the carrier while the other upright end wall is comprised of a center panel and two side panels each oriented at an oblique angle relative to the center panel. The center panel has a planar outer surface with an upright center line and two planar inner surfaces being oriented obliquely to each other at the center line so that the center panel is thinner adjacent the center line than at outer edge portions of the center panel. A transverse outwardly extending upper flange is on each side wall. Each flange has at least two anti-warp indentations adjacent its respective ends to permit the mold to hold the wafer carrier in its originally molded shape as a wafer carrier cools in the mold thereby minimizing the warp of the wafer carrier within the mold.
A moldable plastic, distortion and warp resistant wafer carrier having an open top for insertion and removal of wafers, an open bottom, a pair of opposed upright end walls, and a pair of opposed upright side walls with inner, opposed ribs for spacing axially aligned wafers in the carrier, one said upright end wall being H-shaped with a horizontal indexing bar extending thereacross intermediate the height of the carrier, the other upright end wall comprised of a center panel and two side panels each oriented at an oblique angle relative to the center panel, the center panel having a planar outer surface with an upright center line and two planar inner surfaces being oriented obliquely to each other at the center line so that the center panel is thinner adjacent the center line than at outer edge portions of the center panel thereby adding rigidity to the wafer carrier while minimizing warp stress in the wafer carrier and preventing the other upright end wall from distorting or bowing inwardly when the wafer carrier is subjected to high temperatures or caustic chemicals.
A moldable plastic, distortion and warp resistant wafer carrier to be made in a mold having an open top for insertion and removal of wafers, an open bottom, a pair of opposed side walls with inner, opposed ribs for spacing axially aligned wafers in the carrier, a pair of opposed upright end walls wherein one upright end wall is H-shaped with a horizontal indexing bar extending thereacross intermediate the height of the carrier and having a transverse outwardly extending upper flange with an outer edge on each sidewall extending along the length thereof each said upper flange having at least two anti-warp indentations extending inwardly and separate from the other edge of said upper flange one each adjacent said upper flange's respective ends to permit the mold to hold the wafer carrier in its originally molded shape as the wafer carrier cools in the mold thereby minimizing warp when the wafer carrier is cooling and soldifying within the mold.
A moldable plastic, distortion and warp resistant wafer carrier to be made in a mold having an open top for insertion and removal of wafers, an open bottom, a pair of opposed upright end walls, one said upright end wall being H-shaped with a horizontal indexing bar extending thereacross intermediate the height of the carrier, a pair of opposed upright side walls, with inner, opposed ribs for spacing axially aligned wafers in the carrier, the other upright end wall comprised of a center panel and two side panels each oriented at an oblique angle relative to the center panel, the center panel having a planar outer surface with an upright center line and two planar inner surfaces being oriented obliquely to each other at the center line so that the center panel is thinner adjacent the center line than at outer edge portions of the center panel thereby adding rigidity to the wafer carrier while minimizing warp stress in the wafer carrier and preventing the other upright end wall from distorting or bowing inwardly when the wafer carrier is subjected to high temperatures or caustic chemicals and further having a transverse outwardly extending upper flange on each sidewall extending along the length thereof, each flange having at least two anti-warp indentations one each adjacent said upper flange's respective ends to permit the mold to hold the wafer carrier in its originally molded shape as the wafer carrier cools in the mold thereby minimizing warp when the wafer carrier is cooling and solidifying within the mold.
Dependencies are inferred from the claim text.