Y10S 148/112
Nitridation, direct, of silicon
Y10S148/112 (Nitridation, direct, of silicon) appears on 28 US grants and 0 published applications in this corpus.
Search patents in Y10S- Granted patents
- 28
- Published applications
- 0
- Assignees
- 18
- Inventors
- 42
- Latest grant
- 5 Sep 2000
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 2 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 7 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Method to cure mobile ion contamination in semiconductor processing5 Sep 2000US 6,114,222 AMicron Technology, Inc.
- Method to cure mobile ion contamination in semiconductor processing24 Aug 1999US 5,943,602 AMicron Technology, Inc.
- Non-uniformly nitrided gate oxide and method15 Sep 1998US 5,808,348 AHarris Corporation
- Method to cure mobile ion contamination in semiconductor processing14 Jul 1998US 5,780,364 AMicron Technology, Inc.
- Method of making non-uniformly nitrided gate oxide22 Jul 1997US 5,650,344 AHarris Corporation
No published applications in this class yet.
Most cited
By later US patents
- Method of manufacturing semiconductor device by forming first and second oxide films by use of nitridation132US 5,254,489 ANEC Corporation · 1993
- Semiconductor contact silicide/nitride process with control for silicide thickness102US 4,784,973 AInmos Limited · 1988
- Process for producing a semiconductor device having a silicon oxynitride insulative film93US 4,980,307 AFujitsu Limited · 1990
- Semiconductor device having insulating film90US 4,621,277 AFujitsu Limited · 1986
- Composite dielectric for a semiconductor device and method of fabrication86US 5,258,333 AIntel Corporation · 1993