H10N 30/076
By vapour phase deposition
Official title: by vapour phase deposition
H10N30/076 (By vapour phase deposition) appears on 540 US grants and 663 published applications in this corpus.
Search patents in H10N- Granted patents
- 540
- Published applications
- 663
- Assignees
- 212
- Inventors
- 959
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 4 | 0 |
| 1980 | 4 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 3 | 0 |
| 1998 | 5 | 0 |
| 1999 | 6 | 0 |
| 2000 | 5 | 0 |
| 2001 | 6 | 4 |
| 2002 | 5 | 7 |
| 2003 | 7 | 16 |
| 2004 | 6 | 14 |
| 2005 | 11 | 27 |
| 2006 | 16 | 19 |
| 2007 | 18 | 14 |
| 2008 | 11 | 26 |
| 2009 | 19 | 33 |
| 2010 | 17 | 35 |
| 2011 | 36 | 34 |
| 2012 | 21 | 26 |
| 2013 | 25 | 28 |
| 2014 | 20 | 14 |
| 2015 | 23 | 25 |
| 2016 | 24 | 21 |
| 2017 | 18 | 30 |
| 2018 | 18 | 27 |
| 2019 | 34 | 24 |
| 2020 | 17 | 40 |
| 2021 | 11 | 28 |
| 2022 | 24 | 33 |
| 2023 | 25 | 52 |
| 2024 | 19 | 30 |
| 2025 | 29 | 34 |
| 2026 | 25 | 22 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Piezoelectric element, method for manufacturing piezoelectric element, and liquid ejection head6 Oct 2026US 12,757,636 B2Canon Kabushiki Kaisha
- Microphone device based on two-dimensional piezoelectric material layer having protective layer formed thereon, and method for fabricating the same22 Sep 2026US 12,745,045 B2Research & Business Foundation Sungkyunkwan University
- ScAlN laminate and manufacturing method thereof25 Aug 2026US 12,715,768 B2National Institute of Advanced Industrial Science and Technology
- Fabrication of piezoelectric device with PMNPT layer18 Aug 2026US 12,713,831 B2APPLIED Materials.Inc.
- Piezoelectric stack, method of manufacturing piezoelectric stack, and piezoelectric element18 Aug 2026US 12,713,833 B2Sumitomo Chemical Company, Limited
- Piezoelectric laminate, piezoelectric element, and method for manufacturing piezoelectric laminate17 Sep 2026US 2026/0282750 A1AGC Inc.
- Ferroelectric iii-nitride heterostructures27 Aug 2026US 2026/0255642 A1The Regents of the University of Michigan
- Methods of forming group iii piezoelectric thin films via removal of portions of first sputtered material27 Aug 2026US 2026/0255878 A1Akoustis Technologies Corp.
- Piezoelectric microelectromechanical device and method of manufacture20 Aug 2026US 2026/0247864 A1Aalto University Foundation sr
- Piezoelectric stack, method for manufacturing piezoelectric stack, and piezoelectric element13 Aug 2026US 2026/0239882 A1Sumitomo Chemical Company, Limited
Most cited
By later US patents
- Method and apparatus for preparing integrated circuit thin films by chemical vapor deposition442US 6,110,531 ASymetrix Corporation · 2000
- Substrate structures for electronic devices212US 6,045,626 ATDK Corporation · 2000
- C-axis perovskite thin films grown on silicon dioxide139US 5,248,564 ABell Communications Research, Inc. · 1993
- Integrated scanning tunneling microscope137US 4,906,840 AThe Board of Trustees of the Leland Stanford Jr. University · 1990
- Method of making a piezoelectric shear wave resonator109US 4,640,756 AThe United States of America as represented by the United States Department of Energy · 1987