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US 12,715,768 B2Granted
ScAlN laminate and manufacturing method thereof
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsKenji Hirata, Hiroshi Yamada, Masato Uehara, Sri Ayu Anggraini, Morito Akiyama
Life of this patent
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Abstract
This ScAlN laminate includes a substrate, an intermediate layer formed on the substrate and a ScAlN thin film formed on the intermediate layer, and a nearest neighbor distance, which is a distance between atoms closest to each other in a lattice plane parallel to a surface of the intermediate layer, is shorter than the a-axis length of the ScAlN thin film.
Claims10
A ScAlN laminate comprising:
- a substrate;
- an intermediate layer formed on the substrate;
- and
- a ScAlN thin film formed on the intermediate layer,
- wherein a nearest neighbor distance, which is a distance between atoms closest to each other in a lattice plane parallel to a surface of the intermediate layer, is shorter than an a-axis length of the ScAlN thin film,
- wherein the lattice plane parallel to a surface of the intermediate layer is in the outermost portion of the intermediate layer,
- wherein the ScAlN thin film contains more than 43 mol % of Sc with respect to the total number of atoms of Al and Sc, and
- wherein the nearest neighbor distance of the intermediate layer is 3.34 Å or more and 3.71 Å or less.
5 more elements
A manufacturing method of a ScAlN laminate comprising:
- a step of forming an intermediate layer on a substrate;
- and
- a step of forming a ScAlN thin film on the intermediate layer,
- wherein a nearest neighbor distance, which is a distance between atoms closest to each other in a lattice plane parallel to a surface of the intermediate layer, is shorter than an a-axis length of the ScAlN thin film,
- wherein the lattice plane parallel to a surface of the intermediate layer is in the outermost portion of the intermediate layer,
- wherein the ScAlN thin film contains more than 43 mol % of Sc with respect to the total number of atoms of Al and Sc, and
- wherein the nearest neighbor distance of the intermediate layer is 3.34 Å or more and 3.71 Å or less.
4 more elements
Dependencies are inferred from the claim text.