Piezoelectric laminate, piezoelectric element, and method for manufacturing piezoelectric laminate

A piezoelectric laminate, comprising:

• a substrate;
• and
• a laminated film provided on at least one surface of the substrate, wherein
• the laminated film comprises, in order from a substrate side, an electrode layer, a base layer, and a piezoelectric thin film,
• the base layer and the piezoelectric thin film are in contact with each other, and
• the base layer contains a nitrogen compound, the nitrogen compound containing at least one element selected from the group consisting of Group III to VI elements and excluding zirconium nitride.

A method for manufacturing a piezoelectric laminate comprising a substrate and a laminated film provided on at least one surface of the substrate, the method comprising:

• preparing the substrate;
• and
• forming an electrode layer, a base layer, and a piezoelectric thin film on at least one surface of the substrate in this order, wherein
• the base layer contains a nitrogen compound containing at least one element selected from the group consisting of Group III to VI elements,
• the piezoelectric thin film is formed so as to be in contact with the base layer, and
• the piezoelectric thin film has an absolute value |e31f| of a piezoelectric constant of 0.5 C/m2 or more.

A method for manufacturing a piezoelectric laminate comprising a substrate and a laminated film provided on at least one surface of the substrate, the method comprising:

• preparing the substrate;
• and
• forming an electrode layer, a base layer, and a piezoelectric thin film on at least one surface of the substrate in this order, wherein
• the base layer contains a nitrogen compound, the nitrogen compound containing at least one element selected from the group consisting of Group III to VI elements and excluding zirconium nitride, and
• the piezoelectric thin film is formed so as to be in contact with the base layer.