H03H 9/2463
Clamped-clamped beam resonators
Official title: {Clamped-clamped beam resonators}
H03H9/2463 (Clamped-clamped beam resonators) appears on 204 US grants and 206 published applications in this corpus.
Search patents in H03H- Granted patents
- 204
- Published applications
- 206
- Assignees
- 106
- Inventors
- 364
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 2 |
| 2002 | 4 | 4 |
| 2003 | 6 | 8 |
| 2004 | 4 | 5 |
| 2005 | 2 | 8 |
| 2006 | 6 | 10 |
| 2007 | 6 | 14 |
| 2008 | 7 | 7 |
| 2009 | 12 | 17 |
| 2010 | 6 | 17 |
| 2011 | 21 | 15 |
| 2012 | 18 | 13 |
| 2013 | 14 | 9 |
| 2014 | 16 | 11 |
| 2015 | 9 | 6 |
| 2016 | 8 | 9 |
| 2017 | 8 | 9 |
| 2018 | 7 | 6 |
| 2019 | 9 | 7 |
| 2020 | 7 | 9 |
| 2021 | 4 | 2 |
| 2022 | 5 | 8 |
| 2023 | 9 | 4 |
| 2024 | 7 | 2 |
| 2025 | 2 | 3 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Micro-resonator design implementing internal resonance for MEMS applications6 Jan 2026US 12,519,442 B2Ohio State Innovation Foundation
- Neuromorphic micro-electro-mechanical-system device1 Jul 2025US 12,344,523 B2Socpra Sciences Et Genie S. E. C.
- Microelectromechanical resonator4 Feb 2025US 12,218,647 B2SiTime Corporation
- MEMS resonator31 Dec 2024US 12,184,262 B2KYOCERA Technologies Oy
- Mems apparatus for forming physical unclonable function key and operation method of mems apparatus28 May 2026US 2026/0147942 A1National Taiwan University
- Micro-resonator design implementing internal resonance for mems applications18 Sep 2025US 2025/0293655 A1Ohio State Innovation Foundation
- Microelectromechanical resonator24 Jul 2025US 2025/0239989 A1SiTime Corporation
- Microelectromechanical resonator2 Jan 2025US 2025/0007492 A1SiTime Corporation
- Mems resonator and mems resonator processing method9 May 2024US 2024/0154598 A1
Most cited
By later US patents
- Pattern-aligned carbon nanotube growth and tunable resonator apparatus261US 6,803,840 B2California Institute of Technology · 2004
- Vacuum-cavity MEMS resonator109US 6,808,954 B2Intel Corporation · 2004
- Micromechanical electrostatic resonator79US 7,215,061 B2Seiko Epson Corporation · 2007
- Temperature compensation for silicon MEMS resonator77US 6,987,432 B2Robert Bosch GmbH · 2006
- Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing72US 6,238,946 B1International Business Machines Corporation · 2001