Micro-resonator design implementing internal resonance for MEMS applications
AssigneeOhio State Innovation Foundation
InventorsHan Na Cho, Jun Yu
Life of this patent
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Abstract
Frequency stabilization is provided in a microelectromechanical systems (MEMS) oscillator via tunable internal resonance (IR). A device comprises a MEMS resonator comprising a stepped-beam structure that is a thin-layer structure. The resonator may be configured to implement IR. The stepped-beam structure may be configured to provide flexibility to adjust modal frequencies into a n:m ratio, wherein n and m are integers. The thin-layer structure provides frequency tunability by controlling the mid-plane stretching effect with an applied DC bias. The thin-layer structure compensates for a frequency mismatch from a n:m ratio due to a fabrication error. The MEMS resonator may be an oscillator.
Claims15
A device comprising:
- a non-prismatic resonator configured to implement internal resonance (IR) to provide flexibility to adjust modal frequencies into a n:m ratio, wherein n and m are integers;
- and
- a plurality of electrodes configured to provide voltage to the resonator,
- wherein the non-prismatic resonator is a clamped-clamped silicon structure with varied dimensions, incorporating one or multiple steps or slopes.
A system comprising:
- a micro resonator that incorporates a 1:2 ratio between second and third modal frequencies of the micro resonator,
- wherein the micro resonator comprises a structure with varied dimensions, incorporating one or multiple steps or slopes, configured to provide flexibility to adjust modal frequencies into a n:m ratio, wherein n and m are integers.
Dependencies are inferred from the claim text.