Back to results
US 12,184,262 B2Granted
MEMS resonator
AssigneeKYOCERA Technologies Oy
InventorsAntti Jaakkola, Panu Koppinen
Life of this patent
Estimating the term…
Abstract
A microelectromechanical (MEMS) resonator includes a resonator structure having a plurality of beam elements and connection elements with certain geometry, where the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements, where the geometry of the beam elements or the connection elements varies within the resonator structure.
Claims21
A microelectromechanical resonator, comprising:
- a resonator structure having a plurality of beam elements and connection elements with certain geometry, wherein the plurality of beam elements are positioned adjacent to each other and adjacent beam elements are mechanically connected to each other by the connection elements at both ends, and
- wherein the geometry of the beam elements or the connection elements varies within the resonator structure.
Dependencies are inferred from the claim text.