H03H 9/02244
Of microelectro-mechanical resonators
Official title: {of microelectro-mechanical resonators}
H03H9/02244 (Of microelectro-mechanical resonators) appears on 920 US grants and 935 published applications in this corpus.
Search patents in H03H- Granted patents
- 920
- Published applications
- 935
- Assignees
- 277
- Inventors
- 1,215
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 4 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 3 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 6 |
| 2002 | 9 | 14 |
| 2003 | 12 | 14 |
| 2004 | 14 | 18 |
| 2005 | 14 | 16 |
| 2006 | 15 | 27 |
| 2007 | 20 | 39 |
| 2008 | 22 | 29 |
| 2009 | 36 | 37 |
| 2010 | 32 | 58 |
| 2011 | 55 | 57 |
| 2012 | 39 | 59 |
| 2013 | 48 | 42 |
| 2014 | 62 | 44 |
| 2015 | 44 | 33 |
| 2016 | 48 | 47 |
| 2017 | 35 | 42 |
| 2018 | 45 | 44 |
| 2019 | 49 | 39 |
| 2020 | 60 | 56 |
| 2021 | 40 | 37 |
| 2022 | 43 | 38 |
| 2023 | 50 | 43 |
| 2024 | 44 | 36 |
| 2025 | 35 | 40 |
| 2026 | 27 | 20 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H03H 2009/02488Vibration modesIndexing code437
- H03H 9/02433Means for compensation or elimination of undesired effects326
- H03H 9/02259Driving or detection means311
- H03H 9/02338Suspension means201
- H03H 2009/02283Vibrating meansIndexing code182
- H03H 9/02393Post-fabrication trimming of parameters127
- H03H 2009/02251DesignIndexing code32
Recent patents
- Resonance device and manufacturing method for the same6 Oct 2026US 12,756,371 B2Murata Manufacturing Co., Ltd.
- MEMS resonator22 Sep 2026US 12,744,514 B2KYOCERA Technologies Oy
- Temperature stable MEMS resonator8 Sep 2026US 12,732,155 B1SiTime Corporation
- Resonator electrode shields8 Sep 2026US 12,732,160 B1SiTime Corporation
- Three dimensional stacked microstructures for use in gyroscopes and other devices1 Sep 2026US 12,723,874 B2The Regents of the University of Michigan
- Mems resonator comprising in-phase and out-of-phase elements8 Oct 2026US 2026/0312564 A1KYOCERA Technologies Oy
- Temperature-stable mems resonator1 Oct 2026US 2026/0303057 A1KYOCERA Technologies Oy
- Acoustic devices with residual stress compensation3 Sep 2026US 2026/0261805 A1Skyworks Solutions, Inc.
- Chip with different types of resonators and related timing products27 Aug 2026US 2026/0254455 A1Skyworks Solutions, Inc.
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
Most cited
By later US patents
- Laterally driven resonant microstructures419US 5,025,346 AThe Regents of the University of California · 1991
- Nano- and micro-electromechanical resonators275US 9,425,765 B2Northeastern University · 2016
- Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same268US 8,264,291 B2Sony Corporation · 2012
- Method for manufacturing a vibrating MEMS circuit263US 9,369,105 B1RF Micro Devices, Inc. · 2016
- Pattern-aligned carbon nanotube growth and tunable resonator apparatus261US 6,803,840 B2California Institute of Technology · 2004